公开(公告)号：US20040101987A1

公开(公告)日：2004-05-27

申请号：US10303551

申请日：2002-11-22

Applicant: Xerox Corporation.

Inventor： Michael L. Chabinyc ,  William S. Wong ,  Robert A. Street ,  Kateri E. Paul

IPC: H01L021/00 ,  H01L021/84

CPC classification number: H01L27/283 ,  H01L51/0003 ,  H01L51/0014 ,  H01L51/0021 ,  H01L51/0512

Abstract: A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been found to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.

Abstract translation: 描述了使用微流体通道形成半导体器件阵列的结构和方法。 已经发现微流体通道在自对准工艺中形成并用于互连一系列薄膜晶体管（TFT）器件时特别有用。

公开(公告)号：US20040099911A1

公开(公告)日：2004-05-27

申请号：US10303524

申请日：2002-11-22

Applicant: Xerox Corporation.

Inventor： Michael L. Chabinyc ,  William S. Wong ,  Kateri E. Paul ,  Robert A. Street

IPC: H01L035/24 ,  H01L051/00 ,  H01L023/62

CPC classification number: H01L27/28 ,  H01L25/0655 ,  H01L33/62 ,  H01L51/0512 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been found to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.

Abstract translation: 描述了使用微流体通道形成半导体器件阵列的结构和方法。 已经发现微流体通道在自对准工艺中形成并用于互连一系列薄膜晶体管（TFT）器件时特别有用。