公开(公告)号：US20010035509A1

公开(公告)日：2001-11-01

申请号：US09894492

申请日：2001-06-28

Applicant: Xerox Corporation

Inventor： James Geoffrey Chase ,  Mark Hosang Yim ,  Warren Bruce Jackson ,  Rachel King-Ha Lau ,  David Kalman Biegelsen

IPC: F16K031/02

CPC classification number: B65H5/228 ,  B65H2406/418 ,  F16K31/005

Abstract: This invention relates to a method and apparatus for high-speed fluid flow control. More particularly, the invention is directed to a valve formed, at least in part, of an actuating material, such as piezoelectric or anti-ferro-electric material. The valve is used for controlling fluid flow (including air flow) in a variety of devices including imaging devices (e.g. printers, copiers, etc.) for which air flow is used to handle paper. In one embodiment, the subject valve takes advantage of the phenomenon of buckling, resultant bistability and other structural mechanics to efficiently, and in a high-speed manner, open and close to regulate fluid flow. In another embodiment, the valve includes implementation of the actuating material to bend an s-shaped blocking element within the valve. The valve is also advantageously implemented in matrices and formed using batch fabrication techniques.

Abstract translation: 本发明涉及一种用于高速流体流量控制的方法和装置。 更具体地，本发明涉及至少部分地由诸如压电或反铁电材料的致动材料形成的阀。 该阀用于控制各种装置中的流体流动（包括气流），包括空气流用于处理纸张的成像装置（例如打印机，复印机等）。 在一个实施例中，目标阀有效地并且以高速方式有效地利用了屈曲现象，所得到的双稳态性和其它结构力学性质，以便开启和关闭以调节流体流动。 在另一个实施例中，阀包括致动材料的实现以使阀内的S形阻塞元件弯曲。 阀也有利地以矩阵形式实现并且使用批量制造技术形成。

公开(公告)号：US20020016095A1

公开(公告)日：2002-02-07

申请号：US09917572

申请日：2001-07-27

Applicant: Xerox Corporation

Inventor： David K. Fork ,  Jackson Ho ,  Rachel King-Ha Lau ,  JengPing Lu

IPC: H05K001/00 ,  H01R012/00

CPC classification number: G01R1/06716 ,  B81B2203/0118 ,  B81C1/00484 ,  B81C2201/0136 ,  B81C2203/058 ,  G01R1/06727 ,  G01R1/07342 ,  G01R3/00 ,  H01L23/49811 ,  H01L2924/0002 ,  H01R4/48 ,  H01R12/57 ,  H05K3/4092 ,  Y10T29/4913 ,  Y10T29/49135 ,  Y10T29/4914 ,  H01L2924/00

Abstract: Efficient methods for lithographically fabricating spring structures onto a substrate containing contact pads or metal vias by forming both the spring metal and release material layers using a single mask. Specifically, a pad of release material is self-aligned to the spring metal finger using a photoresist mask or a plated metal pattern, or using lift-off processing techniques. A release mask is then used to release the spring metal finger while retaining a portion of the release material that secures the anchor portion of the spring metal finger to the substrate. When the release material is electrically conductive (e.g., titanium), this release material portion is positioned directly over the contact pad or metal via, and acts as a conduit to the spring metal finger in the completed spring structure. When the release material is non-conductive, a metal strap is formed to connect the spring metal finger to the contact pad/via.

Abstract translation: 通过使用单个掩模通过形成弹簧金属和释放材料层来将含有接触垫或金属通孔的弹性结构光刻制造到衬底上的有效方法。 具体地说，使用光致抗蚀剂掩模或电镀金属图案或使用剥离处理技术，释放材料垫与弹簧金属手指自对准。 然后使用释放掩模释放弹簧金属指，同时保持将弹簧金属指的锚固部分固定到基底的释放材料的一部分。 当释放材料是导电的（例如钛）时，该释放材料部分直接位于接触垫或金属通孔上方，并且用作在完成的弹簧结构中的弹簧金属指的导管。 当释放材料不导电时，形成金属带以将弹簧金属手指连接到接触垫/通孔。