公开(公告)号：US20210036215A1

公开(公告)日：2021-02-04

申请号：US16967373

申请日：2019-01-31

Applicant: XAAR TECHNOLOGY LIMITED

Inventor： Charalampos FRAGKIADAKIS ,  Peter MARDILOVICH ,  Susan TROLIER-MCKINSTRY

IPC: H01L41/257 ,  B41J2/16 ,  H01L41/09

Abstract: A method of poling piezoelectric elements of an actuator comprises applying an electric pulse heating waveform to the piezoelectric element(s) in order to increase the temperature thereof to a poling temperature (S202), applying an electric field poling waveform to the piezoelectric element(s) for a poling time period (S203), and apply an electric field holding poling waveform to the piezoelectric element(s) to maintain poling whilst the temperature of the actuator decreases (S204).

公开(公告)号：US20190074428A1

公开(公告)日：2019-03-07

申请号：US16085378

申请日：2017-03-14

Applicant: Xaar Technology Limited

Inventor： Peter MARDILOVICH ,  Song-Won KO ,  Susan TROLIER-MCKINSTRY ,  Trent BORMAN

IPC: H01L41/318 ,  H01L41/08 ,  B41J2/14 ,  B41J2/16

CPC classification number: H01L41/318 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1642 ,  B41J2002/14266 ,  B41J2202/03 ,  H01L41/0477 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/29

Abstract: A piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between wherein the first electrode is a platinum metal electrode having an average grain size greater than 50 nm and wherein a piezoelectric thin film adjacent the platinum metal electrode comprises a laminate having a plurality of piezoelectric thin film layers wherein a piezoelectric thin film layer contacting the platinum metal electrode comprises lead zirconate titanate (PZT) of composition at or about PbZrxTi1-xO3 where 0

公开(公告)号：US20210126187A1

公开(公告)日：2021-04-29

申请号：US17090165

申请日：2020-11-05

Applicant: XAAR TECHNOLOGY LIMITED

Inventor： Peter MARDILOVICH ,  Song Won KO ,  Susan TROLIER-MCKINSTRY ,  Charalampos FRAGKIADAKIS ,  Wanlin ZHU

IPC: H01L41/187 ,  H01L41/08 ,  H01L41/04

Abstract: The present invention relates to an electrical element comprising a multilayer thin film ceramic member which is a dielectric exhibiting piezoelectric/electrostrictive properties which make it suitable for use in microelectromechanical systems. In one aspect, the present invention provides an electrical element for use in microelectromechanical systems comprising: i) a thin film ceramic member formed of a plurality of layers of ceramic material having a major proportion of a perovskite (ABX3) phase, said thin film ceramic member having a first side and an opposing second side spaced apart in a thickness direction; ii) first and second electrodes disposed adjacent to the thin film ceramic member, wherein, relative to each other, one of the first or second electrodes is a higher potential electrode and the other one of the first and second electrodes is a lower potential electrode, such that a potential difference may be established between the first and second electrodes and through the thin film ceramic member during operation; wherein the thin film ceramic member comprises: a first layer of ceramic material doped with: I) one or more transition metal ions capable of Jahn-Teller distortion of the perovskite crystal structure of the ceramic material and/or II) one or more non-transition metal ions which have a lower oxidation state and/or one or more transition metal ions which preferentially undergo reduction, compared to the B-site cation of the perovskite crystal structure of the ceramic material; and a second layer of ceramic material not doped with any of the one or more metal ions as defined for the first layer of ceramic material; and wherein said first layer of ceramic material is located, over the thickness of the thin film ceramic member, so as to be: a) in contact with both of the first and second electrodes, wherein the first and second electrodes are both disposed adjacent to one of the first or second sides of the thin film ceramic member; or b) in contact with the one of the first or second electrodes which is the lower potential electrode, wherein first and second electrodes are interposed by the thin film ceramic member.

公开(公告)号：US20210013394A1

公开(公告)日：2021-01-14

申请号：US17014808

申请日：2020-09-08

Applicant: XAAR TECHNOLOGY LIMITED

Inventor： Peter MARDILOVICH ,  Susan TROLIER-MCKINSTRY

IPC: H01L41/18 ,  H01L41/09 ,  H01L41/318 ,  H01L41/08 ,  H01L41/187 ,  B41J2/14 ,  H01L41/047 ,  H01L41/29

Abstract: A piezoelectric thin film element having a first electrode, a second electrode and a piezoelectric thin film between the electrodes, wherein the thin film comprises a laminate having two or more piezoelectric thin film layers and wherein a first thin film layer is doped by one or more dopants and a second film layer is doped by one or more dopants and wherein at least one dopant of the second thin film layer is different from the dopant or dopants of the first thin film layer.