Heater and Single Crystal Growing Apparatus
    1.
    发明公开

    公开(公告)号:US20240279841A1

    公开(公告)日:2024-08-22

    申请号:US18567705

    申请日:2022-09-30

    Inventor: Wenwu YANG

    CPC classification number: C30B15/14 C30B29/06

    Abstract: A heater that may be included in a single crystal growing apparatus includes a heating body. The heating body has a bowl shape and has a bottom having an opening. The heating body is divided into a first heating zone and a second heating zone in the circumferential direction. The first heating zone includes a first main heating area and the second heating zone includes a second main heating area. The first main heating area and the second main heating area are located at different position with different heights in the axial direction of the heating body.

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