Polishing silicon wafers
    1.
    发明授权

    公开(公告)号:US06736714B2

    公开(公告)日:2004-05-18

    申请号:US08941386

    申请日:1997-09-30

    Inventor: Walter Dudovicz

    CPC classification number: B24B37/205 B24B21/04 B24B37/26 B24D11/06

    Abstract: An endless belt for a belt type polishing machine comprises a support fabric and a polymer layer of relatively low hardness. The polymer layer is formed with drainage grooves. The support fabric may comprise a non woven or woven material, or a membrane with oriented reinforcing yarns. A further version comprises a spiral-link fabric supporting a woven or non woven layer carrying the polymer layer. The polymer layer may be a double layer, the upper of which is either harder or softer than the lower layer.

    Roller apparatus
    2.
    发明授权
    Roller apparatus 失效
    滚筒装置

    公开(公告)号:US5571223A

    公开(公告)日:1996-11-05

    申请号:US90685

    申请日:1993-06-22

    Inventor: Walter Dudovicz

    Abstract: A roller apparatus (23) for use in the drying section of an apparatus for producing corrugated board comprises a tubular body operative to be received over a metal roller. The wall of the tubular body comprises an inner layer (24) of relatively hard polyurethane and an outer layer (25) of a deformable polyurethane. A spiral winding of yarn (26) is wrapped around the inner layer (24).

    Abstract translation: 用于生产瓦楞纸板的装置的干燥部分的滚筒装置(23)包括可操作地接收在金属辊上的管状体。 管体的壁包括相对硬的聚氨酯的内层(24)和可变形聚氨酯的外层(25)。 纱线(26)的螺旋缠绕缠绕在内层(24)周围。

    Polishing silicon wafers
    3.
    发明授权
    Polishing silicon wafers 有权
    抛光硅片

    公开(公告)号:US06971950B2

    公开(公告)日:2005-12-06

    申请号:US10689678

    申请日:2003-10-22

    Inventor: Walter Dudovicz

    CPC classification number: B24B37/205 B24B21/04 B24B37/26 B24D11/06

    Abstract: An endless belt for a belt type polishing machine comprises a support fabric and a polymer layer of relatively low hardness. The polymer layer is formed with drainage grooves. The support fabric may comprise a non woven or woven material, or a membrane with oriented reinforcing yarns. A further version comprises a spiral-link fabric supporting a woven or non woven layer carrying the polymer layer. The polymer layer may be a double layer, the upper of which is either harder or softer than the lower layer.

    Abstract translation: 用于带式抛光机的环形带包括支撑织物和相对低硬度的聚合物层。 聚合物层形成有排水槽。 支撑织物可以包括非织造或编织材料或具有取向增强纱线的膜。 另一版本包括支撑承载聚合物层的机织或非编织层的螺旋链节织物。 聚合物层可以是双层,其上部比下层更硬或更软。

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