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1.发明申请公开(公告)号：US20220026881A1
公开(公告)日：2022-01-27
申请号：US17443595
申请日：2021-07-27
发明人： Jacob LINDLEY , Miranda PIZZELLA , Jeremy QUANDT , Philip SCHMIDT , John BERGEN , Hanwen YUAN , Daniel GANDER
IPC分类号： G05B19/4155
摘要： A method of controlling a thermal system of an industrial process includes monitoring intermediate data, associating the intermediate data with correlation data, wherein the correlation data includes an internal process control input, an external heater control input, the output control, or a combination thereof. The method further includes generating a model that defines a relationship between the intermediate data and the correlation data, identifying a state of the heater system based on the model, and selectively performing a corrective action based on the identified state of the heater system.
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2.发明公开公开(公告)号：US20230400375A1
公开(公告)日：2023-12-14
申请号：US18457929
申请日：2023-08-29
CPC分类号： G01M3/002 , G01M3/18 , G01M3/2815
摘要： A method of detecting a leak-induced abnormal condition in a semiconductor processing system comprising a subsystem. The method includes determining a performance characteristic of the semiconductor processing system. The method includes determining the leak-induced abnormal condition is present within the subsystem, wherein the determination of the presence of the leak-induced abnormal condition is based on the performance characteristic and a temperature characteristic of the subsystem. The method also includes performing a corrective action based on the determination of the presence of the leak-induced abnormal condition.
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公开(公告)号：US20210134630A1
公开(公告)日：2021-05-06
申请号：US17089447
申请日：2020-11-04
IPC分类号： H01L21/67
摘要： A method for monitoring a semiconductor processing system including a gas delivery system, a thermal system, and a fluid flow line includes obtaining a plurality of operational data from the gas delivery system, the thermal system, or a combination thereof and determining a performance characteristic of the fluid flow line based on one or more operational data of the plurality of operational data. The method includes identifying one or more locations associated with the one or more operational data in a reference virtual model and generating a dynamic state model of the fluid flow line based on the reference virtual model, the one or more identified locations, and the determined performance characteristic, where the dynamic state model is a digital representation of the fluid flow line.
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公开(公告)号：US20220228942A1
公开(公告)日：2022-07-21
申请号：US17578975
申请日：2022-01-19
摘要： A method of detecting a leak-induced abnormal condition in a fluid line system having a plurality of heaters includes determining a plurality of temperature characteristics at a plurality of locations of the fluid line system, where each temperature from among the plurality of temperature characteristics is associated with at least one heater from among the plurality of heaters and monitoring, for each of the plurality of heaters, an electrical characteristic of the heater. The method includes determining the leak-induced abnormal condition is present within the fluid line system in response to the electrical characteristic of a given heater from among the plurality of heaters and the temperature characteristic associated with the given heater satisfying a temperature-and-electrical characteristics (TEC) deviation condition and performing a corrective action in response to determining the leak-induced abnormal condition is present.
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公开(公告)号：US20210340669A1
公开(公告)日：2021-11-04
申请号：US17306200
申请日：2021-05-03
摘要： A method includes providing thermal energy to a component, determining a thermal response of the component in response to providing the thermal energy, and determining a thermal characteristic of the component based on a reference thermal response and the thermal response. The method includes predicting a surface condition of the component based on the thermal characteristic and a predictive analytic model, where the predictive analytic model correlates the thermal characteristic of the component to an estimated surface condition of the component.
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公开(公告)号：US20230203648A1
公开(公告)日：2023-06-29
申请号：US18116581
申请日：2023-03-02
CPC分类号： C23C16/4401 , G01N25/20 , G06Q10/04 , G06Q50/04
摘要： A method for monitoring a surface condition of a component includes providing thermal energy to a component, determining a thermal response of the heater in response to providing the thermal energy, and determining a thermal characteristic of the component based on a reference thermal response and the thermal response. The method includes predicting the surface condition of the component based on the thermal characteristic and a predictive analytic model, where the predictive analytic model correlates the thermal characteristic of the component to an estimated surface condition of the component.
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公开(公告)号：US20220090951A1
公开(公告)日：2022-03-24
申请号：US17479880
申请日：2021-09-20
发明人： John LILLELAND , Grant BREWER , Li ZHENG , Terry MADSON , Sanhong ZHANG , Miranda PIZZELLA
IPC分类号： G01F1/88
摘要： A sensor for detecting material deposits in a fluid flow conduit includes a body and an array of pairs of temperature sensors disposed within the body, where each pair of temperature sensors is spaced a distance apart along a primary flow direction of the fluid flow conduit.
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