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公开(公告)号:US20230095480A1
公开(公告)日:2023-03-30
申请号:US17449150
申请日:2021-09-28
Applicant: VIAVI Solutions Inc.
Inventor: Jinhui YANG , Marius GRIGONIS , Georg J. OCKENFUSS , Karen Denise HENDRIX
Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material, and wherein a stress of the first subset of layers is between −1000 and 800 megapascals; and a second subset of layers, wherein the second subset of layers comprises at least one other material.
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公开(公告)号:US20230168418A1
公开(公告)日:2023-06-01
申请号:US17457123
申请日:2021-12-01
Applicant: VIAVI Solutions Inc.
Inventor: Georg J. OCKENFUSS , Jinhui YANG , Marius GRIGONIS , Karen Denise HENDRIX , Andy SHKABKO
Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers comprises an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers comprises at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.
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公开(公告)号:US20170336544A1
公开(公告)日:2017-11-23
申请号:US15617654
申请日:2017-06-08
Applicant: Viavi Solutions, Inc.
Inventor: Karen Denise HENDRIX , Richard A. Bradley , Marius Grigonis , Georg J. Ockenfuss
CPC classification number: G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
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公开(公告)号:US20160266289A1
公开(公告)日:2016-09-15
申请号:US15158191
申请日:2016-05-18
Applicant: Viavi Solutions, Inc.
Inventor: Karen Denise HENDRIX , Richard A. BRADLEY, JR. , Marius GRIGONIS , Georg J. OCKENFUSS
CPC classification number: G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
Abstract translation: 提供具有与800nm至1100nm的波长范围至少部分重叠的通带的滤光器。 滤光器包括由氢化硅层和交替堆叠的低折射率层形成的滤光片叠层。 氢化硅层在800nm至1100nm的波长范围内的折射率大于3,在800nm至1100nm的波长范围内的消光系数小于0.0005。
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公开(公告)号:US20190296067A1
公开(公告)日:2019-09-26
申请号:US16425280
申请日:2019-05-29
Applicant: VIAVI Solutions Inc.
Inventor: Karen Denise HENDRIX , Charles A. Hulse , Richard A. Bradley , Jeffrey James Kuna
IPC: H01L27/146 , G01J3/02 , G02B5/28 , G01J3/26
Abstract: A variable optical filter is disclosed including a bandpass filter and a blocking filter. The bandpass filter includes a stack of alternating first and second layers, and the blocking filter includes a stack of alternating third and fourth layers. The first, second and fourth materials each comprise different materials, so that a refractive index of the first material is smaller than a refractive index of the second material, which is smaller than a refractive index of the fourth material; while an absorption coefficient of the second material is smaller than an absorption coefficient of the fourth material. The materials can be selected to ensure high index contrast in the blocking filter and low optical losses in the bandpass filter. The first to fourth layers can be deposited directly on a photodetector array.
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公开(公告)号:US20190196072A1
公开(公告)日:2019-06-27
申请号:US16290612
申请日:2019-03-01
Applicant: VIAVI Solutions Inc.
Inventor: Karen Denise HENDRIX , Richard A. BRADLEY, JR. , Marius GRIGONIS , Georg J. OCKENFUSS
CPC classification number: G02B5/281 , G01J5/0862 , G02B1/11 , G02B1/115 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
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公开(公告)号:US20180231791A1
公开(公告)日:2018-08-16
申请号:US15431344
申请日:2017-02-13
Applicant: Viavi Solutions Inc.
Inventor: Karen Denise HENDRIX , Scott ROWLANDS
CPC classification number: G02B27/283 , G02B5/28 , G02B5/281 , G02B5/3041 , G02B5/3066
Abstract: An optical filter may include a substrate. The optical filter may include a set of alternating high refractive index layers and low refractive index layers disposed onto the substrate to polarization beam split incident light. The set of alternating high refractive index layers and low refractive index may layers may be disposed such that a first polarization of the incident light with a spectral range of less than approximately 800 nanometers (nm) is reflected by the optical filter and a second polarization of the incident light with a spectral range of greater than approximately 800 nm is passed through by the optical filter. The high refractive index layers may be hydrogenated silicon (Si:H). The low refractive index layers may be silicon dioxide (SiO2).
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公开(公告)号:US20240393516A1
公开(公告)日:2024-11-28
申请号:US18792711
申请日:2024-08-02
Applicant: VIAVI Solutions Inc.
Inventor: Karen Denise HENDRIX , Richard A. BRADLEY , Marius GRIGONIS , Georg J. OCKENFUSS
IPC: G02B5/28 , C23C14/08 , C23C14/18 , C23C14/54 , C23C14/58 , G01J5/0802 , G02B1/11 , G02B1/115 , G02B5/20 , G06V40/20 , H04N5/33 , H04N13/254
Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
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公开(公告)号:US20230097506A1
公开(公告)日:2023-03-30
申请号:US17449149
申请日:2021-09-28
Applicant: VIAVI Solutions Inc.
Inventor: Jinhui YANG , Marius GRIGONIS , Georg J. OCKENFUSS , Karen Denise HENDRIX
Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material; and a second subset of layers, wherein the second subset of layers comprises a hydrogenated silicon (Si:H) material.
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公开(公告)号:US20210028213A1
公开(公告)日:2021-01-28
申请号:US16947898
申请日:2020-08-24
Applicant: VIAVI Solutions Inc.
Inventor: Karen Denise HENDRIX , Charles A. HULSE , Richard A. BRADLEY , Jeffrey James KUNA
IPC: H01L27/146 , G02B5/28 , G01J3/26 , G01J3/02
Abstract: A variable optical filter is disclosed including a bandpass filter and a blocking filter. The bandpass filter includes a stack of alternating first and second layers, and the blocking filter includes a stack of alternating third and fourth layers. The first, second and fourth materials each comprise different materials, so that a refractive index of the first material is smaller than a refractive index of the second material, which is smaller than a refractive index of the fourth material; while an absorption coefficient of the second material is smaller than an absorption coefficient of the fourth material. The materials can be selected to ensure high index contrast in the blocking filter and low optical losses in the bandpass filter. The first to fourth layers can be deposited directly on a photodetector array.
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