公开(公告)号：US20170191893A1

公开(公告)日：2017-07-06

申请号：US15387919

申请日：2016-12-22

Applicant: University of Massachusetts

Inventor： Wenhui Wang ,  Xingwei Vivian Wang ,  Kai Sun ,  Nan Wu

IPC: G01L7/08 ,  B23K26/324 ,  A61B5/00 ,  G02B6/30 ,  A61B5/021 ,  B23K26/24 ,  B23K26/362

CPC classification number: G01L7/086 ,  A61B5/0082 ,  A61B5/021 ,  B23K26/24 ,  B23K26/324 ,  B23K26/362 ,  G02B6/30 ,  Y10T156/10 ,  Y10T156/1052

Abstract: An optical fiber sensor can be used to measure pressure with high sensitivity and fine resolution. As a cavity at the end of the sensor expands or contracts, the spectrum of a beam reflected from the end of fiber shifts, producing a change linked to pressure exerted on the sensor. Novel aspects of the present inventive sensor include the direct bonding of a silica thin film diaphragm to the optical fiber with localized or confined heating and a uniform thickness of the diaphragm. The resulting sensor has a diameter that matches the diameter of the optical fiber. Because the sensor is all silica, it does not suffer from temperature-induced error. In addition, the sensor can be very sensitive because the diaphragm can be very thin; it can also make highly repeatable measurements due to its very uniform thickness.

公开(公告)号：US10281348B2

公开(公告)日：2019-05-07

申请号：US15387919

申请日：2016-12-22

Applicant: University of Massachusetts

Inventor： Wenhui Wang ,  Xingwei Vivian Wang ,  Kai Sun ,  Nan Wu

IPC: G01L9/00 ,  G01L7/08 ,  A61B5/00 ,  A61B5/021 ,  B23K26/24 ,  B23K26/324 ,  B23K26/362 ,  G02B6/30

Abstract: An optical fiber sensor can be used to measure pressure with high sensitivity and fine resolution. As a cavity at the end of the sensor expands or contracts, the spectrum of a beam reflected from the end of fiber shifts, producing a change linked to pressure exerted on the sensor. Novel aspects of the present inventive sensor include the direct bonding of a silica thin film diaphragm to the optical fiber with localized or confined heating and a uniform thickness of the diaphragm. The resulting sensor has a diameter that matches the diameter of the optical fiber. Because the sensor is all silica, it does not suffer from temperature-induced error. In addition, the sensor can be very sensitive because the diaphragm can be very thin; it can also make highly repeatable measurements due to its very uniform thickness.