公开(公告)号：US09193580B1

公开(公告)日：2015-11-24

申请号：US14531843

申请日：2014-11-03

Applicant: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.

Inventor： Henry A. Sodano ,  Aneesh K. Venkata

IPC: B81B3/00 ,  B81C1/00 ,  B81C3/00

CPC classification number: B81B3/0021 ,  B81B2201/032 ,  B81C1/0019 ,  B81C3/005 ,  G01P15/0922 ,  H01L41/1136 ,  H01L41/31 ,  H02N2/18

Abstract: A nano-electromechanical system comprises piezoelectric vertically aligned BaTiO3 nanowire arrays for energy-harvesting applications, sensors, and other applications. The aligned piezoelectric nanowire arrays provide highly accurate nano-electromechanical system-based dynamic sensor with a wide operating bandwidth and unity coherence and energy harvesters at low frequencies. The growth of vertically aligned (B45-mm long) barium titanate nanowire arrays is realized through a hydrothermal synthesis.

Abstract translation: 纳米机电系统包括用于能量收集应用，传感器和其它应用的压电垂直排列的BaTiO3纳米线阵列。 对准的压电纳米线阵列提供高精度的基于纳米机电系统的动态传感器，具有宽的工作带宽和低频的单位相干和能量收集器。 通过水热合成实现垂直取向（B45-mm）钛酸钡纳米线阵列的生长。