公开(公告)号：US20240271999A1

公开(公告)日：2024-08-15

申请号：US18586536

申请日：2024-02-25

Applicant: Tsubasa SAITO

Inventor： Tsubasa SAITO

IPC: G01J3/26 ,  G01J3/02 ,  G01J3/18 ,  G01J3/28 ,  G01J3/453

CPC classification number: G01J3/26 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/0237 ,  G01J3/0291 ,  G01J3/1804 ,  G01J3/2823 ,  G01J3/4535 ,  G01J2003/2843

Abstract: The present invention includes: a light supply part; an interfering light formation part; and a detection part, in which the interfering light formation part includes a fixed reflection part, a movable reflection part, and a moving part that moves and fixes the movable reflection part along a base plane, the fixed reflection part includes a first reflection surface that reflects supplied light supplied from the light supply part and a second reflection surface provided so as to be plane-symmetrical with the first reflection surface with respect to the base plane and to be orthogonal to the first reflection surface, and the movable reflection part includes a third reflection surface and a fourth reflection surface parallel to a first reflection surface and a second reflection surface of the fixed reflection part, respectively.