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公开(公告)号:US20230136715A1
公开(公告)日:2023-05-04
申请号:US17434085
申请日:2021-05-21
发明人: Xueling Zhang , Wei Liu , Hong Chen , Lei Jian , Yifeng Chen
IPC分类号: H01L31/18 , H01L31/0216 , H01L31/0224 , H01L31/068
摘要: A laminated passivation structure of solar cell and a preparation method thereof are disclosed herein. The laminated passivation structure of solar cell includes a P-type silicon substrate, a first dielectric layer, a second dielectric layer, and a third dielectric layer sequentially arranged on the back side of the P-type silicon substrate from inside to outside. The preparation method includes generating a first dielectric layer on the back surface of the P-type silicon substrate, and then sequentially depositing a second dielectric layer and a third dielectric layer on the first dielectric layer.
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公开(公告)号:US20230361227A1
公开(公告)日:2023-11-09
申请号:US17430951
申请日:2021-05-21
发明人: Xueling Zhang , Wei Liu , Hong Chen , Lei Jian , Yifeng Chen
IPC分类号: H01L31/0216 , H01L31/18
CPC分类号: H01L31/02167 , H01L31/18
摘要: A laminated passivation structure of solar cell and a preparation method thereof are disclosed herein. The laminated passivation structure of solar cell includes a P-type silicon substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer and a fourth dielectric layer sequentially arranged on the back surface of the P-type silicon substrate from inside to outside. The preparation method includes generating a first dielectric layer on the back surface of the P-type silicon substrate, and then sequentially depositing a second dielectric layer, a third dielectric layer and a fourth dielectric layer on the first dielectric layer.
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