LAMINATED PASSIVATION STRUCTURE OF SOLAR CELL AND PREPARATION METHOD THEREOF

    公开(公告)号:US20230361227A1

    公开(公告)日:2023-11-09

    申请号:US17430951

    申请日:2021-05-21

    IPC分类号: H01L31/0216 H01L31/18

    CPC分类号: H01L31/02167 H01L31/18

    摘要: A laminated passivation structure of solar cell and a preparation method thereof are disclosed herein. The laminated passivation structure of solar cell includes a P-type silicon substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer and a fourth dielectric layer sequentially arranged on the back surface of the P-type silicon substrate from inside to outside. The preparation method includes generating a first dielectric layer on the back surface of the P-type silicon substrate, and then sequentially depositing a second dielectric layer, a third dielectric layer and a fourth dielectric layer on the first dielectric layer.