公开(公告)号：US11383211B2

公开(公告)日：2022-07-12

申请号：US16560481

申请日：2019-09-04

申请人： Tokyo Electron Limited

发明人： Ronald W. Nasman ,  Lior Huli ,  Anton deVilliers ,  Rodney Robison ,  Norman Jacobson ,  James Grootegoed

IPC分类号： B01F15/00 ,  B01F13/00 ,  B01F7/00 ,  B01F35/71 ,  B01F33/30 ,  B01F35/221 ,  B01F25/40

摘要： A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.

公开(公告)号：US20200338510A1

公开(公告)日：2020-10-29

申请号：US16560481

申请日：2019-09-04

申请人： Tokyo Electron Limited

发明人： Ronald W. NASMAN ,  Lior Huli ,  Anton DeVilliers ,  Rodney Robison ,  Norman Jacobson ,  James Grootegoed

IPC分类号： B01F15/02 ,  B01F13/00 ,  B01F15/00

摘要： A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.