公开(公告)号：US20060180173A1

公开(公告)日：2006-08-17

申请号：US11395500

申请日：2006-03-31

申请人： Thomas Johnston ,  Timothy Vaughn ,  Pete Atwell

发明人： Thomas Johnston ,  Timothy Vaughn ,  Pete Atwell

IPC分类号： B08B3/12 ,  B08B5/04 ,  C23F1/00

CPC分类号： H01L21/67069 ,  B08B7/0057 ,  B09B5/00 ,  C22B7/001 ,  G03F7/42 ,  G03F7/427 ,  H01L21/02071 ,  H01L21/31138 ,  H01L21/67115 ,  Y02P10/214

摘要： The system and method of the present invention removes organic and organometallic materials from an article in reduced pressure atmosphere containing ozone and activated oxygen. A dielectric barrier discharge lamp induces an intermolecular molecule energy transfer to the organic and organometallic material. The dielectric barrier discharge lamp emits vacuum ultraviolet rays having a wavelength of about 172 nm that produce a photochemical reaction with the oxygen-containing gas to generate ozone and the activated oxygen. The organic and organometallic material is then attached by the ozone and activated oxygen

摘要翻译： 本发明的系统和方法在含有臭氧和活性氧的减压气氛中从制品中除去有机和有机金属材料。 电介质阻挡放电灯诱导分子间能量转移到有机和有机金属材料。 电介质阻挡放电灯发射具有约172nm的波长的真空紫外线，与含氧气体产生光化学反应以产生臭氧和活性氧。 有机和有机金属材料然后通过臭氧和活性氧附着

公开(公告)号：US20080302400A1

公开(公告)日：2008-12-11

申请号：US11844575

申请日：2007-08-24

申请人： Thomas Johnston ,  Timothy Vaughn ,  Pete Atwell

发明人： Thomas Johnston ,  Timothy Vaughn ,  Pete Atwell

IPC分类号： B08B3/00

CPC分类号： G03F7/427 ,  B08B7/0057

摘要： The system and method of the present invention removes organic and organometallic materials from an article in reduced pressure atmosphere containing ozone and activated oxygen. A dielectric barrier discharge lamp induces an intermolecular molecule energy transfer to the organic and organometallic material. The dielectric barrier discharge lamp emits vacuum ultraviolet rays having a wavelength of about 172 nm that produce a photochemical reaction with the oxygen-containing gas to generate ozone and the activated oxygen. The organic and organometallic material is then attached by the ozone and activated oxygen

摘要翻译： 本发明的系统和方法在含有臭氧和活性氧的减压气氛中从制品中除去有机和有机金属材料。 电介质阻挡放电灯诱导分子间能量转移到有机和有机金属材料。 电介质阻挡放电灯发射具有约172nm的波长的真空紫外线，与含氧气体产生光化学反应以产生臭氧和活性氧。 有机和有机金属材料然后通过臭氧和活性氧附着