公开(公告)号：US09754360B2

公开(公告)日：2017-09-05

申请号：US14978845

申请日：2015-12-22

Applicant: The Research Foundation for the State University of New York

Inventor： Eric Lifshin ,  Yudhishthir Kandel

IPC: G06T5/00 ,  H01J37/28

CPC classification number: G06T5/003 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/2823 ,  H01J2237/3175

Abstract: A point spread function (PSF) of a focused scanning particle beam of an observation instrument is ascertained by obtaining a first image (reference image) based on a reference instrument, the reference image being an image of an area of a reference standard, obtaining a second image (observed image) of the area of the reference standard, and the observed image obtained using the observation instrument configured with a set of operational parameters that define a probe size for the observation instrument, the probe size being larger than a pixel size of the reference image, and then determining, based on the reference image and the observed image, the PSF of the observation instrument as a component of a convolution of the reference image that provides the observed image.

公开(公告)号：US20160180190A1

公开(公告)日：2016-06-23

申请号：US14978845

申请日：2015-12-22

Applicant: The Research Foundation for the State University of New York

Inventor： Eric Lifshin ,  Yudhishthir Kandel

IPC: G06K9/46 ,  G06T7/00

CPC classification number: G06T5/003 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/2823 ,  H01J2237/3175

Abstract: A point spread function (PSF) of a focused scanning particle beam of an observation instrument is ascertained by obtaining a first image (reference image) based on a reference instrument, the reference image being an image of an area of a reference standard, obtaining a second image (observed image) of the area of the reference standard, and the observed image obtained using the observation instrument configured with a set of operational parameters that define a probe size for the observation instrument, the probe size being larger than a pixel size of the reference image, and then determining, based on the reference image and the observed image, the PSF of the observation instrument as a component of a convolution of the reference image that provides the observed image.

Abstract translation: 通过获得基于参考仪器的第一图像（参考图像），参考图像是参考标准的区域的图像来获得观察仪器的聚焦扫描粒子束的点扩散函数（PSF），获得 参考标准区域的第二图像（观察图像）和使用配置有一组限定观察仪器的探针尺寸的操作参数的观察仪器获得的观察图像，探头尺寸大于 参考图像，然后基于参考图像和观察图像将观察仪器的PSF确定为提供观察图像的参考图像的卷积的分量。