公开(公告)号：US06710332B2

公开(公告)日：2004-03-23

申请号：US10131516

申请日：2002-04-23

Applicant: Hideya Joukawa ,  Tatsuki Kakimoto

Inventor： Hideya Joukawa ,  Tatsuki Kakimoto

IPC: H01J314

CPC classification number: G01D5/34715

Abstract: A diffracting portion is composed of optical elements including an optical element, and diffracts light. A drive unit rotates the optical element. An angle detector detects a rotation angle of the optical element. A reference wavelength light source includes a light source and an absorption cell sealed with a plurality of gasses of different kinds having mutually different absorption line wavelengths, and emits the reference light of a specific wavelength depended on the absorption cell toward the diffracting portion. A reference photodetector converts a diffracted light from the diffracting portion into an electric signal. A signal processor receives a rotation angle issued by the angle detector when detecting a predetermined value of the electric signal, and determines the predetermined rotation angle corresponding to the specific wavelength determined depending on the plurality of gases.

Abstract translation: 衍射部分由包括光学元件的光学元件组成，并衍射光。 驱动单元旋转光学元件。 角度检测器检测光学元件的旋转角度。 参考波长光源包括光源和用具有相互不同的吸收线波长的多种不同种类的气体密封的吸收单元，并且将依赖于吸收单元的特定波长的参考光发射到衍射部分。 参考光电检测器将衍射部分的衍射光转换成电信号。 当检测到电信号的预定值时，信号处理器接收角度检测器发出的旋转角度，并且确定与根据多个气体确定的特定波长对应的预定旋转角度。

公开(公告)号：US5828061A

公开(公告)日：1998-10-27

申请号：US718594

申请日：1996-09-26

Applicant: Tatsuki Kakimoto

Inventor： Tatsuki Kakimoto

IPC: G01D5/28 ,  G01D5/30 ,  G01D5/38 ,  G01J3/06 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01D5/28 ,  G01D5/30 ,  G01D5/38 ,  G01J3/06

Abstract: In order to improve the accuracy of the absolute value of a wavelength of diffraction light in a diffraction grating, a gas absorption line resulting from an absorption cell 8 is used as a wavelength reference 8. When reference light is exited from a light source 7 in a wavelength reference light source 1, the reference light is transmitted to a diffraction grating 2 as transmitted light having a spectrum absorbing only light of a predetermined wavelength by the absorption cell 8 to allow it to be reciprocated in a predetermined angle range. The diffraction grating 2 produces a split light beam from the transmitted light from the absorption cell 8. The diffraction grating 2 splits the transmitted light from the absorption cell 8 to provide diffracted light and the diffracted light from the diffraction grating 2 is received by the reference light receiving unit 3. It is possible to, without being affected by a variation in the environmental condition, accurately know the rotation angle of the diffracting grating 2 from the diffracted light of the absorption line-existing waveform component received by the reference light receiving unit 3, that is, the rotation angle of the diffraction grating 2 at a wavelength at that time.

Abstract translation: PCT No.PCT / JP95 / 02547 Sec。 371日期1996年9月26日 102（e）1996年9月26日PCT 1995年12月13日PCT PCT。 出版物WO96 / 26414 日期1996年8月29日为了提高衍射光栅中的衍射光的波长的绝对值的精度，使用由吸收单元8产生的气体吸收线作为波长参考8.当参考光从 在波长参考光源1中的光源7，参考光作为透射光透射到衍射光栅2，该透射光通过吸收单元8吸收仅具有预定波长的光的光谱，以允许其以预定角度往复运动 范围。 衍射光栅2从来自吸收单元8的透射光产生分裂光束。衍射光栅2将来自吸收单元8的透射光分离以提供衍射光，衍射光栅2的衍射光被参考 光接收单元3.可以在不受环境条件的变化的影响的情况下，由参考光接收单元接收的吸收线存在的波形分量的衍射光精确地知道衍射光栅2的旋转角度 3，即衍射光栅2在此时的波长处的旋转角度。