公开(公告)号：US06784595B2

公开(公告)日：2004-08-31

申请号：US10229210

申请日：2002-08-28

申请人： Keigo Iizawa ,  Takashi Yamazaki ,  Shigeo Kanna

发明人： Keigo Iizawa ,  Takashi Yamazaki ,  Shigeo Kanna

IPC分类号： H01L4108

CPC分类号： H03H3/10 ,  H03H9/02551

摘要： The invention provides a method for adjusting the temperature-dependent property of a surface acoustic wave device is provided,, The method is appropriate for a temperature-dependent property that is expressed by a cubic function of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate. The invention therefore provides a method for adjusting the temperature-dependent property of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate having Euler angles of (0°, 113-135°, ±(40-49°)). The range of Euler angles is defined so that the temperature-dependent property of the surface acoustic wave device, using an in-plane rotated ST cut quartz crystal plate having the temperature-dependent property expressed by a cubic function, has an extreme value within the temperature range of −40 to +85° C., and the temperature-dependent property is rotated about the inflection point to minimize the frequency fluctuation within the operational temperature range by using appropriate regions.

摘要翻译： 本发明提供了一种用于调节表面声波器件的温度依赖性的方法，该方法适用于使用平面内的声表面波器件的三次函数表示的温度依赖性 旋转ST切割石英晶体板。 因此，本发明提供了一种使用具有（0°，113-135°，±（40-49°））欧拉角的平面内旋转的ST切割石英晶体板来调节声表面波器件的温度依赖性的方法， ）。 欧拉角的范围被定义为使用具有由三次函数表示的温度依赖性的平面内旋转的ST切割石英晶体板，声表面波器件的温度依赖特性在 温度范围为-40至+ 85℃，并且温度依赖性质围绕拐点旋转，以通过使用适当的区域使工作温度范围内的频率波动最小化。

公开(公告)号：US06774747B2

公开(公告)日：2004-08-10

申请号：US10211578

申请日：2002-08-05

申请人： Takashi Yamazaki ,  Keigo Iizawa ,  Shigeo Kanna

发明人： Takashi Yamazaki ,  Keigo Iizawa ,  Shigeo Kanna

IPC分类号： H03H900

CPC分类号： H03H9/02551

摘要： The invention provides a surface acoustic wave device which uses an in-plane rotated ST cut quartz crystal plate around the Z′-axis, and which has a large reflection coefficient of the Rayleigh wave. Comb teeth-like IDT electrodes are provided and reflectors to trap the Rayleigh wave are provided on both sides of the IDT electrodes on the principal surface of the in-plane rotated ST cut quartz crystal plate. The electrode width and pitch at the IDT electrodes are defined as Lt, Pt, the width and pitch of short-circuit electrodes at the reflectors as Lr, Pr, and the thickness of the IDT electrodes and the short-circuit electrodes side as Ht and Hr. If the electrode widths and pitches are set up so that either or both of Lt/Pt and Lr/Pr become 0.32±0.1, this enables maximizing the reflection coefficient and achieving the miniaturization of device itself by reducing the number of the short-circuit electrodes.

摘要翻译： 本发明提供一种表面声波装置，其使用围绕Z'轴的平面内旋转的ST切割石英晶体板，并且其具有大的瑞利波的反射系数。 提供梳齿状IDT电极，并且在面内旋转的ST切割石英晶体板的主表面上的IDT电极的两侧设置有用于捕获瑞利波的反射器。 IDT电极的电极宽度和间距被定义为Lt，Pt，反射器上的短路电极的宽度和间距为Lr，Pr，IDT电极和短路电极侧的厚度为Ht， 呃 如果设置电极宽度和间距，使得Lt / Pt和Lr / Pr中的任一个或两者变为0.32±0.1，则能够通过减少短路电极的数量来最大化反射系数并实现器件本身的小型化 。

公开(公告)号：US06856218B2

公开(公告)日：2005-02-15

申请号：US10329445

申请日：2002-12-27

申请人： Takashi Yamazaki ,  Keigo Iizawa ,  Shigeo Kanna

发明人： Takashi Yamazaki ,  Keigo Iizawa ,  Shigeo Kanna

IPC分类号： H03H9/02 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/25 ,  H03H9/02543

摘要： The invention provides an in-plane rotational ST-cut SAW resonator that is formed of an in-plane rotational ST-cut crystal plate having Eulerian angles of (0°, 113° to 135°, and ±(40° to 49°)). The in-plane rotational ST-cut SAW resonator can include an interdigital transducer (IDT) electrode for exciting a Rayleigh wave on the main surface. The ratio Lt/Pt of the electrode width Lt and the interelectrode pitch Pt of the IDT electrode is 0.5 or more and 0.65 or less. Accordingly, a reduction in the fluctuation in resonance frequency relative to the variations in an IDT electrode of a surface acoustic wave device by using the in-plane rotated ST-cut crystal plate around the Z′-axis can be achieved.

摘要翻译： 本发明提供一种面内旋转ST切割SAW谐振器，其由具有（0°，113°至135°和±（40°至49°））的欧拉角的平面内旋转ST切割晶体板形成， ）。 平面内旋转ST切割SAW谐振器可以包括用于激励主表面上的瑞利波的叉指式换能器（IDT）电极。 电极宽度Lt的比率Lt / Pt和IDT电极的电极间间距Pt为0.5以上且0.65以下。 因此，通过使用围绕Z'轴的平面内旋转的ST切割晶体板，可以实现相对于声表面波器件的IDT电极的变化的共振频率的波动的减小。

公开(公告)号：US07352104B2

公开(公告)日：2008-04-01

申请号：US11010014

申请日：2004-12-10

申请人： Takashi Yamazaki ,  Keigo Iizawa

发明人： Takashi Yamazaki ,  Keigo Iizawa

IPC分类号： H01L41/08

CPC分类号： H03H3/08 ,  H03H9/02551 ,  H03H9/14547 ,  H03H9/14594

摘要： A surface acoustic wave element is provided including an IDT and reflectors provided on both sides of the IDT that are on a surface of a quartz plate. The quartz plate is made from an in-plane rotated ST cut quartz plate whose cutting angle is expressed as (0°, 113°-135°, ±(40°-49°)) by defining and using Euler angle. The IDT and reflectors are arranged at a slant of PFA±3° with respect to a direction of a phase velocity of a surface acoustic wave in the quartz plate. If the cutting angle of the quartz plate is expressed by the Euler angle (φ°, θ°, Ψ°), the power flow angle PFA is expressed that the PFA=0.374 (θ°−90°)−10.0°.

摘要翻译： 提供了表面声波元件，其包括设置在石英板表面上的IDT两侧的IDT和反射器。 石英板由面内旋转的ST切割石英板制成，其切割角度通过定义和使用欧拉角表示为（0°，113°-135°，±（40°-49°））。 相对于石英板中表面声波的相速度的方向，IDT和反射器以PFA±3°的倾斜度布置。 如果石英板的切割角度由欧拉角（phi°，θ°，Psi°）表示，则功率流角PFA表示为PFA = 0.374（θ°-90°）-10.0°。

公开(公告)号：US06946932B2

公开(公告)日：2005-09-20

申请号：US10679480

申请日：2003-10-07

申请人： Michiaki Takagi ,  Yoshio Maeda ,  Takashi Yamazaki ,  Keigo Iizawa

发明人： Michiaki Takagi ,  Yoshio Maeda ,  Takashi Yamazaki ,  Keigo Iizawa

IPC分类号： H01L41/09 ,  H01L41/18 ,  H03H9/02 ,  H03H9/145 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/25 ,  H03H9/02551 ,  H03H9/14582

摘要： In a substrate in which a reflection coefficient γ of a surface acoustic wave per electrode is small, the invention obtains a Q value or a CI value level, which is equivalent to or higher than that of a related art product, at a device size which is equivalent to the related art product which addresses the problem that the size of a surface acoustic wave resonator becomes larger. A surface acoustic wave resonator includes one interdigital transducer to excite a surface acoustic wave in a propagation direction x on a piezoelectric plate and a pair of reflectors arranged on both sides thereof in the propagation direction. The interdigital transducer is divided into three regions. The electrode fingers of the interdigital transducer of each region are formed at a fixed pitch which differs within 2%. The surface acoustic wave resonator possesses a single peak response. The form in which a vibration displacement envelope amplitude in the interdigital transducer region is normalized is a form which takes a maximum value 1 at the center position, which smoothly takes a value in a range of 0.33 to 0.53 at a position ¼ from both ends, and which smoothly takes a value in a range of 0.048 to 0.177 at positions at both ends.

摘要翻译： 在每个电极的表面声波的反射系数γ小的基板中，本发明以如下装置尺寸获得与现有技术产品相同或更高的Q值或CI值电平 相当于解决声表面波谐振器的尺寸变大的问题的现有技术的产品。 表面声波谐振器包括一个叉指式换能器，以在压电板上的传播方向x上激发表面声波，并且在传播方向的两侧布置一对反射器。 叉指换能器分为三个区域。 每个区域的叉指换能器的电极指以固定的间距形成，其在2％内不同。 表面声波谐振器具有单峰响应。 叉指换能器区域中的振动位移包络振幅被归一化的形式是在中心位置处取最大值1的形式，在两端的位置¼平滑地取0.33〜0.53的范围内的值， 并且在两端的位置平滑地获得0.048〜0.177的范围的值。

公开(公告)号：US20050127781A1

公开(公告)日：2005-06-16

申请号：US11010014

申请日：2004-12-10

申请人： Takashi Yamazaki ,  Keigo Iizawa

发明人： Takashi Yamazaki ,  Keigo Iizawa

IPC分类号： H03H9/25 ,  H03H3/08 ,  H03H9/02 ,  H03H9/145

CPC分类号： H03H3/08 ,  H03H9/02551 ,  H03H9/14547 ,  H03H9/14594

摘要： A surface acoustic wave element is provided including an IDT and reflectors provided on both sides of the IDT that are on a surface of a quartz plate. The quartz plate is made from an in-plane rotated ST cut quartz plate whose cutting angle is expressed as (0°, 113°-135°, ±(40°-49°)) by defining and using Euler angle. The IDT and reflectors are arranged at a slant of PFA±3° with respect to a direction of a phase velocity of a surface acoustic wave in the quartz plate. If the cutting angle of the quartz plate is expressed by the Euler angle (φ°, θ°, Ψ°), the power flow angle PFA is expressed that the PFA=0.374 (θ°−90°)−10.0°.

摘要翻译： 提供了表面声波元件，其包括设置在石英板表面上的IDT两侧的IDT和反射器。 石英板由面内旋转的ST切割石英板制成，其切割角度通过定义和使用欧拉角表示为（0°，113°-135°，±（40°-49°））。 相对于石英板中表面声波的相速度的方向，IDT和反射器以PFA±3°的倾斜度布置。 如果石英板的切割角度由欧拉角（phi°，θ°，Psi°）表示，则功率流角PFA表示为PFA = 0.374（θ°-90°）-10.0°。

公开(公告)号：US08237326B2

公开(公告)日：2012-08-07

申请号：US13304524

申请日：2011-11-25

申请人： Keigo Iizawa

发明人： Keigo Iizawa

IPC分类号： H01L41/08

CPC分类号： H03H9/02551 ,  H03H9/02622 ,  H03H9/0542

摘要： A surface acoustic wave device, includes: an interdigital transducer serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers; a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (φ, θ, ψ) of (0°, 95°≦θ≦155°, 33°≦|ψ|≦46°); electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode; and electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned. The surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave.

摘要翻译： 声表面波装置包括：用作激励瑞利声表面波的电极图案的叉指换能器，叉指换能器包括具有多个电极指的梳齿形电极; 压电基板，其上形成有叉指式换能器，压电基板由石英基板制成，该石英基板以（0°，95°）的欧拉角表示（＆Phgr;＆amp; t;ψ）表示的切割角切割 ＆nlE;＆thetas;＆nlE; 155°，33°＆nlE; |ψ|＆nlE; 46°）; 形成在梳齿状电极的电极指之间的电极指槽; 并且电极指基部是夹在电极指槽之间的石英部分，并且具有电极指在其上的上表面。 表面声波装置在表面声波的阻挡带的上限模式中提供激励。

公开(公告)号：US08084918B2

公开(公告)日：2011-12-27

申请号：US13175344

申请日：2011-07-01

申请人： Keigo Iizawa

发明人： Keigo Iizawa

IPC分类号： H01L41/08

CPC分类号： H03H9/02551 ,  H03H9/02622 ,  H03H9/0542

摘要： A surface acoustic wave device, includes: an interdigital transducer serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers; a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (φ, θ, ψ) of (0°, 95°≦θ≦155°, 33°≦|ψ|≦46°); electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode; and electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned. The surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave.

摘要翻译： 声表面波装置包括：用作激励瑞利声表面波的电极图案的叉指换能器，叉指换能器包括具有多个电极指的梳齿形电极; 压电基板，其上形成有叉指式换能器，压电基板由石英基板制成，该石英基板以（0°，95°）的欧拉角表示（＆Phgr;＆amp; t;ψ）表示的切割角切割 ＆nlE;＆thetas;＆nlE; 155°，33°＆nlE; |ψ|＆nlE; 46°）; 形成在梳齿状电极的电极指之间的电极指槽; 并且电极指基部是夹在电极指槽之间的石英部分，并且具有电极指在其上的上表面。 表面声波装置在表面声波的阻挡带的上限模式中提供激励。

公开(公告)号：US08598766B2

公开(公告)日：2013-12-03

申请号：US13310123

申请日：2011-12-02

申请人： Takuya Owaki ,  Kunihito Yamanaka ,  Keigo Iizawa ,  Kenichi Hano

发明人： Takuya Owaki ,  Kunihito Yamanaka ,  Keigo Iizawa ,  Kenichi Hano

IPC分类号： H01L41/09

CPC分类号： H01L41/047 ,  H03H9/02551 ,  H03H9/0542 ,  H03H9/1071 ,  H03H9/14538 ,  H03H9/14558 ,  H03H9/14594

摘要： A surface acoustic wave resonator includes a quartz crystal substrate with Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, and 42.79°≦|Ψ|≦49.57°), and an IDT provided on the quartz crystal substrate that includes a plurality of electrode fingers and excites a stop band upper end mode surface acoustic wave. Inter-electrode finger grooves are provided between the electrode fingers. If a line occupation rate of the convex portions of the quartz crystal substrate disposed between the inter-electrode finger grooves is ηg, and a line occupation rate of the electrode fingers disposed on the convex portions is ηe, ηg>ηe and 0.59

摘要翻译： 表面声波谐振器包括具有欧拉角（-1.5°@ phi @ 1.5°，117°@ @ 142°和42.79°@ | Psi | @ 49.57°）的石英晶体基板，以及设置在石英 晶体基板，其包括多个电极指并且激发阻带上端模式声表面波。 在电极指之间设置有电极间的指槽。 如果设置在电极间槽之间的石英晶体基板的凸部的线占有率为etag，并且设置在凸部上的电极指的线占有率为etae，et et et al。 当IDT的有效线占用率等级为线占有率etag的算术平均值和线占有率etae时，满足0.73。

公开(公告)号：US08063534B2

公开(公告)日：2011-11-22

申请号：US12368783

申请日：2009-02-10

申请人： Keigo Iizawa

发明人： Keigo Iizawa

IPC分类号： H01L41/09

CPC分类号： H03H9/02551 ,  H03H9/02622 ,  H03H9/0542

摘要： A surface acoustic wave device, includes: an interdigital transducer serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers; a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (φ, θ, Ψ) of (0°, 95°≦θ≦155°, 33°≦|Ψ|≦46°); electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode; and electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned. The surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave.

摘要翻译： 声表面波装置包括：用作激励瑞利声表面波的电极图案的叉指换能器，叉指换能器包括具有多个电极指的梳齿形电极; 压电基板，其上形成有叉指式换能器，压电基板由以（0°，95°）的欧拉角表示（＆Phgr;Θ;Ψ）表示的切割角切割的石英基板制成 ＆nlE;＆thetas;＆nlE; 155°，33°＆nlE; |Ψ|＆nlE; 46°）; 形成在梳齿状电极的电极指之间的电极指槽; 并且电极指基部是夹在电极指槽之间的石英部分，并且具有电极指在其上的上表面。 表面声波装置在表面声波的阻挡带的上限模式中提供激励。