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公开(公告)号：US11249112B2
公开(公告)日：2022-02-15
申请号：US16933576
申请日：2020-07-20
发明人： Mill-Jer Wang , Ching-Nen Peng , Hung-Chih Lin , Wei-Hsun Lin , Sen-Kuei Hsu , De-Jian Liu
摘要： A testing apparatus with reduced warping of the probe card and a method of reducing warping of a probe card of a testing apparatus are disclosed. The testing apparatus can include a testing head and a platform opposite the testing head, where the testing head and platform move relative to one another to bring a sample into contact with probing tips of the testing apparatus. The testing head can include a probe card printed circuit board, a stiffener, a discontinuous backer and a plurality of probing tips. The stiffener can be coupled to and reinforcing the probe card. The discontinuous backer can extend from the probe card to the stiffener, and can include at least one unfilled void extending from the stiffener to the probe card. The plurality of probing tips can extend from a distal end of the testing head.
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2.发明授权Test-yield improvement devices for high-density probing techniques and method of implementing the same 有权用于高密度探测技术的测试产量改进装置及其实施方法公开(公告)号：US09354254B2
公开(公告)日：2016-05-31
申请号：US13865243
申请日：2013-04-18
发明人： Mill-Jer Wang , Ching-Nen Peng , Hung-Chih Lin , Wei-Hsun Lin , Sen-Kuei Hsu , De-Jian Liu
CPC分类号： G01R1/07314 , G01R1/06794 , G01R1/07364
摘要： A testing apparatus with reduced warping of the probe card and a method of reducing warping of a probe card of a testing apparatus are disclosed. The testing apparatus can include a testing head and a platform opposite the testing head, where the testing head and platform move relative to one another to bring a sample into contact with probing tips of the testing apparatus. The testing head can include a probe card printed circuit board, a stiffener, a discontinuous backer and a plurality of probing tips. The stiffener can be coupled to and reinforcing the probe card. The discontinuous backer can extend from the probe card to the stiffener, and can include at least one unfilled void extending from the stiffener to the probe card. The plurality of probing tips can extend from a distal end of the testing head.
摘要翻译： 公开了一种具有减小探针卡翘曲的测试装置和减少测试装置的探针卡翘曲的方法。 测试装置可以包括测试头和与测试头相对的平台，其中测试头和平台相对于彼此移动以使样本与测试装置的探测尖端接触。 测试头可以包括探针卡印刷电路板，加强件，不连续的支撑件和多个探测尖端。 加强件可以联接到并加强探针卡。 不连续的支撑件可以从探针卡延伸到加强件，并且可以包括从加强件延伸到探针卡的至少一个未填充的空隙。 多个探测尖端可以从测试头的远端延伸。
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公开(公告)号：US10718790B2
公开(公告)日：2020-07-21
申请号：US16378288
申请日：2019-04-08
发明人： Mill-Jer Wang , Ching-Nen Peng , Hung-Chih Lin , Wei-Hsun Lin , Sen-Kuei Hsu , De-Jian Liu
摘要： A testing apparatus with reduced warping of the probe card and a method of reducing warping of a probe card of a testing apparatus are disclosed. The testing apparatus can include a testing head and a platform opposite the testing head, where the testing head and platform move relative to one another to bring a sample into contact with probing tips of the testing apparatus. The testing head can include a probe card printed circuit board, a stiffener, a discontinuous backer and a plurality of probing tips. The stiffener can be coupled to and reinforcing the probe card. The discontinuous backer can extend from the probe card to the stiffener, and can include at least one unfilled void extending from the stiffener to the probe card. The plurality of probing tips can extend from a distal end of the testing head.
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公开(公告)号：US10274518B2
公开(公告)日：2019-04-30
申请号：US15140758
申请日：2016-04-28
发明人： Mill-Jer Wang , Ching-Nen Peng , Hung-Chih Lin , Wei-Hsun Lin , Sen-Kuei Hsu , De-Jian Liu
摘要： A testing apparatus with reduced warping of the probe card and a method of reducing warping of a probe card of a testing apparatus are disclosed. The testing apparatus can include a testing head and a platform opposite the testing head, where the testing head and platform move relative to one another to bring a sample into contact with probing tips of the testing apparatus. The testing head can include a probe card printed circuit board, a stiffener, a discontinuous backer and a plurality of probing tips. The stiffener can be coupled to and reinforcing the probe card. The discontinuous backer can extend from the probe card to the stiffener, and can include at least one unfilled void extending from the stiffener to the probe card. The plurality of probing tips can extend from a distal end of the testing head.
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