SEMICONDUCTOR TREATMENT LIQUID AND METHOD FOR MANUFACTURING SAME

    公开(公告)号:US20230121726A1

    公开(公告)日:2023-04-20

    申请号:US17915189

    申请日:2021-03-30

    Abstract: Provided are: a semiconductor treatment liquid comprising high-purity isopropyl alcohol, wherein the concentration of the oxolane compound expressed in formula (1) below when held for 60 days in a nitrogen atmosphere at 50° C. in a SUS304 container is 25 ppb or less on a mass basis in relation to the isopropyl alcohol; and a method for manufacturing said semiconductor treatment liquid. In the formula, R1 and R2 each independently represent a hydrogen atom or a C1-3 alkyl group, and the total number of carbon atoms in R1 and R2 is 3 or less. R3 represents a hydrogen atom or an isopropyl group.

    HIGH-PURITY ISOPROPYL ALCOHOL AND METHOD FOR MANUFACTURING SAME

    公开(公告)号:US20220002641A1

    公开(公告)日:2022-01-06

    申请号:US17281712

    申请日:2019-09-30

    Abstract: Provided is a high-purity isopropyl alcohol in which the concentration of a C7-12 acetal compound is 100 ppb or less on a mass basis, the concentration of the acetal compound in an accelerated test involving heating for 4 hours at 80° C. in a nitrogen atmosphere is increased by a factor of 30 or less with respect to the value thereof prior to heating, and the concentration of the acetal compound is maintained at a value of 100 ppb or less on a mass basis. Also provided is a method for manufacturing said high-purity isopropyl alcohol.

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