公开(公告)号：US20220252453A1

公开(公告)日：2022-08-11

申请号：US17672114

申请日：2022-02-15

Applicant: THE UNIVERSITY OF TOKYO

Inventor： Daisuke HIRANO ,  Makoto GONOKAMI ,  Kosuke YOSHIOKA

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/02 ,  G01J3/10 ,  G01J3/45

Abstract: A coherent light source outputs coherent light including high-order harmonics obtained by irradiating short-pulse laser light to a nonlinear medium. A spectrometer includes a grating that diffracts the coherent light and an image sensor that measures an image of the diffracted light. In a first state, a first double slit having a pair of apertures spaced apart in a first direction is arranged at a predetermined position between coherent light source and an incident slit of spectrometer. In a second state, a second double slit that is a replica of first double slit is arranged at the predetermined position as a replacement of first double slit with a sample held in one aperture. A calculation processing device calculates optical constants of the sample based on interference images measured in the first and second states.