专利检索 ap:("THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS") AND inv:"Didem OZEVIN" 第 1 页

1.

发明申请
MICRO-ELECTRO-MECHANICAL-SYSTEMS BASED ACOUSTIC EMISSION SENSORS 审中-公开

公开(公告)号：US20170370768A1

公开(公告)日：2017-12-28

申请号：US15542746

申请日：2016-01-11

申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

发明人： Didem OZEVIN , Hossain SABOONCHI

IPC分类号： G01H11/06 , H04R7/02 , H04R19/00 , H04R31/00

CPC分类号： G01H11/06 , H04R7/02 , H04R19/00 , H04R19/005 , H04R31/00 , H04R2201/003

摘要： Acoustic emission (AE) microelectromechanical system (MEMS) transducers of the present disclosure utilize a spring-mass system and a capacitance-change transduction principle. The transducers include a dielectric layer between a fixed electrode and a moveable metal layer to reduce the stiction failure. The moveable metal layer may displace in a particular direction when interacting with elastic waves. Additionally, the moveable metal layer may be formed using an electroplating technique. In some embodiments, multiple spring-mass unit cells may be combined in parallel to increase the sensitivity of the transducer.