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公开(公告)号：US3077754A
公开(公告)日：1963-02-19
申请号：US75230758
申请日：1958-07-31
Applicant: TEXAS INSTRUMENTS INC
Inventor： ROSS WILLIAM H
CPC classification number: H01L21/67126 , C03C27/044 , H01J5/20 , H01J5/24 , H01J2893/0037 , H01J2893/0039 , H01L21/50
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