公开(公告)号：US11722117B2

公开(公告)日：2023-08-08

申请号：US17102835

申请日：2020-11-24

申请人： TAIYO YUDEN CO., LTD.

发明人： Ryohei Komiyama

IPC分类号： H03H9/02 ,  H03H3/04 ,  H03H9/72 ,  H10N30/87

CPC分类号： H03H9/02574 ,  H03H3/04 ,  H03H9/02559 ,  H03H9/02834 ,  H03H9/725 ,  H10N30/87 ,  H03H2003/0407

摘要： An acoustic wave resonator includes a support substrate, a piezoelectric layer that is disposed on the support substrate and is a rotated Y-cut X-propagation lithium tantalate of which a cut angle is within a range of greater than 50° and less than 150°, and a pair of comb-shaped electrodes disposed on the piezoelectric layer, each of the comb-shaped electrodes including a plurality of electrode fingers, an average pitch of the electrode fingers of one of the comb-shaped electrodes being equal to or greater than ½ of a thickness of the piezoelectric layer.

公开(公告)号：US10938372B2

公开(公告)日：2021-03-02

申请号：US16390739

申请日：2019-04-22

申请人： TAIYO YUDEN CO., LTD.

发明人： Ryohei Komiyama ,  Hitoshi Tsukidate ,  Shinji Yamamoto

IPC分类号： H03H9/02 ,  H03H3/10 ,  H03H9/145 ,  H03H9/64 ,  H03H9/72 ,  B23K26/53 ,  B23K26/00 ,  H03H9/25 ,  H01L41/338 ,  H01L41/312

摘要： An acoustic wave resonator includes: a piezoelectric substrate; a pair of comb-shaped electrodes that is located on the piezoelectric substrate and excites an acoustic wave, each of the pair of comb-shaped electrodes including a plurality of electrode fingers; and a polycrystalline substrate that is located at an opposite side of the piezoelectric substrate from a surface on which the pair of comb-shaped electrodes is located, an average particle size of the polycrystalline substrate being equal to or less than 66 times an average pitch of the plurality of electrode fingers.

公开(公告)号：US11336259B2

公开(公告)日：2022-05-17

申请号：US16802071

申请日：2020-02-26

申请人： TAIYO YUDEN CO., LTD.

发明人： Shinji Yamamoto ,  Ryohei Komiyama ,  Koichi Satoh ,  Hitoshi Tsukidate ,  Michio Miura

IPC分类号： H03H9/02 ,  H03H9/25 ,  H03H9/64 ,  H03H9/145 ,  H03H9/72 ,  H03H3/08 ,  H03H9/05

摘要： An acoustic wave device includes: a piezoelectric substrate: a pair of comb-shaped electrodes located on the piezoelectric substrate, each of the comb-shaped electrodes including a plurality of electrode fingers; a support substrate having protruding portions and/or recessed portions in a region overlapping with the pair of comb-shaped electrodes in plan view, the protruding portions and/or recessed portions being regularly arranged; and an insulating layer directly or indirectly bonded between the piezoelectric substrate and the support substrate, a boundary face between the insulating layer and the support substrate being provided along the protruding portions and/or the recessed portions.