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公开(公告)号：US10162276B2
公开(公告)日：2018-12-25
申请号：US15093452
申请日：2016-04-07
Inventor： Wen-Hao Cheng , Chue-San Yoo , Tsiao-Chen Wu
Abstract: The present disclosure provides an apparatus. The apparatus comprises a field generator, configured to produce a field shield protecting a reticle from foreign particles.
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