公开(公告)号：US09194885B2

公开(公告)日：2015-11-24

申请号：US13820098

申请日：2011-09-02

申请人： Stojan Kanev ,  Botho Hirschfeld ,  Axel Becker ,  Ulf Hackius

发明人： Stojan Kanev ,  Botho Hirschfeld ,  Axel Becker ,  Ulf Hackius

IPC分类号： G01R1/04 ,  G01R31/26 ,  G01R31/28 ,  G01R31/319

CPC分类号： G01R1/0408 ,  G01R31/2601 ,  G01R31/2868 ,  G01R31/31907

摘要： The invention relates to a prober for checking and testing electronic semiconductor components and methods of using the same. The prober comprises at least two checking units, each of which is equipped with a chuck, probes, and a positioning unit, and each of which is assigned to a machine control system and a process control system. The prober further comprises a loading unit for automatically loading both testing units and an additional loader for manually loading at least one of the testing units, a user interface, and a module control system for controlling the process control systems and/or the machine control systems and the loading unit. The user interface can optionally be connected to at least one of the process control systems or the module control system by means of a switching device of the prober.

摘要翻译： 本发明涉及用于检查和测试电子半导体元件的探测器及其使用方法。 探测器包括至少两个检查单元，每个检查单元都配备有卡盘，探针和定位单元，并且每个检查单元分配给机器控制系统和过程控制系统。 探测器还包括用于自动加载两个测试单元的加载单元和用于手动加载至少一个测试单元的附加加载器，用户界面和用于控制过程控制系统和/或机器控制系统的模块控制系统 和装载单元。 用户界面可以通过探测器的切换装置可选地连接到过程控制系统或模块控制系统中的至少一个。

公开(公告)号：US20140145743A1

公开(公告)日：2014-05-29

申请号：US13820098

申请日：2011-09-02

申请人： Stojan Kanev ,  Botho Hirschfeld ,  Axel Becker ,  Ulf Hackius

发明人： Stojan Kanev ,  Botho Hirschfeld ,  Axel Becker ,  Ulf Hackius

IPC分类号： G01R1/04 ,  G01R31/26

CPC分类号： G01R1/0408 ,  G01R31/2601 ,  G01R31/2868 ,  G01R31/31907

摘要： The invention relates to a prober for checking and testing electronic semiconductor components and methods of using the same. The prober comprises at least two checking units, each of which is equipped with a chuck, probes, and a positioning unit, and each of which is assigned to a machine control system and a process control system. The prober further comprises a loading unit for automatically loading both testing units and an additional loader for manually loading at least one of the testing units, a user interface, and a module control system for controlling the process control systems and/or the machine control systems and the loading unit. The user interface can optionally be connected to at least one of the process control systems or the module control system by means of a switching device of the prober.

摘要翻译： 本发明涉及用于检查和测试电子半导体元件的探测器及其使用方法。 探测器包括至少两个检查单元，每个检查单元都配备有卡盘，探针和定位单元，并且每个检查单元分配给机器控制系统和过程控制系统。 探测器还包括用于自动加载两个测试单元的加载单元和用于手动加载至少一个测试单元的附加加载器，用户界面和用于控制过程控制系统和/或机器控制系统的模块控制系统 和装载单元。 用户界面可以通过探测器的切换装置可选地连接到过程控制系统或模块控制系统中的至少一个。

公开(公告)号：US07573283B2

公开(公告)日：2009-08-11

申请号：US11765019

申请日：2007-06-19

申请人： Axel Schmidt ,  Frank Fehrmann ,  Ulf Hackius ,  Stojan Kanev ,  Steffen Laube ,  Jorg Kiesewetter

发明人： Axel Schmidt ,  Frank Fehrmann ,  Ulf Hackius ,  Stojan Kanev ,  Steffen Laube ,  Jorg Kiesewetter

IPC分类号： G01R31/06

CPC分类号： G01R31/2891

摘要： A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.

摘要翻译： 公开了一种用于测量探针台中的晶片和其它半导体部件的方法，其用于电子部件的检查和测试。 被测器件由卡盘和至少一个电探头通过探针支架和被测器件保持，并且探针通过具有电驱动器的定位装置相对于彼此选择性地定位，并且被测器件被接触。 定位装置的驱动器保持在准备状态，直到建立接触并且在建立接触之后和在测试装置的测量之前被关闭。

公开(公告)号：US20110013011A1

公开(公告)日：2011-01-20

申请号：US12847723

申请日：2010-07-30

申请人： Michael Teich ,  Ulf Hackius ,  Juliane Busch ,  Joerg Kiesewetter ,  Axel Becker

发明人： Michael Teich ,  Ulf Hackius ,  Juliane Busch ,  Joerg Kiesewetter ,  Axel Becker

IPC分类号： H04N7/18

CPC分类号： G02B21/365 ,  G02B21/06 ,  G02B21/244 ,  G02B21/26 ,  G02B21/32

摘要： A focused multi-planar image acquisition in real time even while a test object is moving, is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of separated probe needles, a microscope is focused on the surface of the test object at a first time and on a plane of the probe needles at a second time. The objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of a vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.

摘要翻译： 使用用于在探测器中聚焦的多平面图像采集的系统和方法来实现即使在测试对象移动时实时聚焦的多平面图像采集。 当测试对象的表面相对于分离的探针的尖端横向定位时，显微镜在第一时间和第二次在探针的平面上聚焦在测试对象的表面上。 物镜上设有显微镜物镜聚焦系统，该系统可独立于显微镜的垂直调节驱动物体将物镜聚焦在第一焦平面和第二焦平面上的测试物体的表面上， 在探针针尖的水平上。

公开(公告)号：US20070064992A1

公开(公告)日：2007-03-22

申请号：US11470884

申请日：2006-09-07

申请人： Michael Teich ,  Juliane Busch ,  Axel Becker ,  Ralf Keller ,  Jorg Kiesewetter ,  Ulf Hackius

发明人： Michael Teich ,  Juliane Busch ,  Axel Becker ,  Ralf Keller ,  Jorg Kiesewetter ,  Ulf Hackius

IPC分类号： G06K9/00

CPC分类号： G06T7/001

摘要： A process is provided for inspection of a variety of structures on the basis of a golden template, that was attained by recording and statistical analysis of greyscale pictures and is compared to the greyscale picture of the structure to be evaluated based on position. The underlying task is to report any such inspection process, with which a positioning of the test structure relative to the golden template and a structure detection with sub-pixel accuracy is carried out. In positioning of each further structure to be recorded, which follows a first recorded structure, the further structure is fundamentally positioned in accordance with the first positioned structure, applicable characteristic values of the greyscale picture recorded in this position are determined and hence a degree of similarity is determined. On this basis, the position of further structures relative to the primary position are determined and corrected with sub-pixel accuracy, before a new greyscale picture is recorded, which forms the basis for further analysis.

摘要翻译： 提供了一种基于黄色模板来检查各种结构的过程，这是通过记录和统计分析灰度图像而获得的，并且与基于位置的待评估结构的灰度图像进行比较。 基本任务是报告任何这样的检查过程，通过该过程，测试结构相对于黄金模板的定位和进行子像素精度的结构检测。 在按照第一记录结构进行记录的每个另外的结构的定位中，根据第一定位结构基本上定位另外的结构，确定记录在该位置的灰度图像的适用特征值，并因此确定相似度 决心，决意，决定。 在此基础上，在记录新的灰度图像之前，以子像素精度确定和校正进一步结构相对于主位置的位置，这是进一步分析的基础。

公开(公告)号：US08072586B2

公开(公告)日：2011-12-06

申请号：US12847723

申请日：2010-07-30

申请人： Michael Teich ,  Ulf Hackius ,  Juliane Busch ,  Joerg Kiesewetter ,  Axel Becker

发明人： Michael Teich ,  Ulf Hackius ,  Juliane Busch ,  Joerg Kiesewetter ,  Axel Becker

IPC分类号： G01N21/00

CPC分类号： G02B21/365 ,  G02B21/06 ,  G02B21/244 ,  G02B21/26 ,  G02B21/32

摘要： A focused multi-planar image acquisition in real time even while a test object is moving, is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of separated probe needles, a microscope is focused on the surface of the test object at a first time and on a plane of the probe needles at a second time. The objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of a vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.

摘要翻译： 使用用于在探测器中聚焦的多平面图像采集的系统和方法来实现即使在测试对象移动时实时聚焦的多平面图像采集。 当测试对象的表面相对于分离的探针的尖端横向定位时，显微镜在第一时间和第二次在探针的平面上聚焦在测试对象的表面上。 物镜上设有显微镜物镜聚焦系统，该系统可独立于显微镜的垂直调节驱动物体将物镜聚焦在第一焦平面和第二焦平面上的测试物体的表面上， 在探针针尖的水平上。

公开(公告)号：US20080212078A1

公开(公告)日：2008-09-04

申请号：US11964744

申请日：2007-12-27

申请人： Michael Teich ,  Ulf Hackius ,  Juliane Busch ,  Joerg Kiesewetter

发明人： Michael Teich ,  Ulf Hackius ,  Juliane Busch ,  Joerg Kiesewetter

IPC分类号： G01N21/00 ,  G01N21/25

CPC分类号： G02B21/365 ,  G02B21/06 ,  G02B21/244 ,  G02B21/26 ,  G02B21/32

摘要： The invention relates to a system and a method for capturing images in a prober. According to the invention, the surface of a test object is illuminated in succession with light of a first, second and third color; and an image capturing device records a gray scale image of the surface; and a composite image is produced from the three gray scale images by means of an image evaluating device. The object of the invention is to qualitatively improve the image capturing, in order to raise the positioning accuracy by means of an improved display, as a result of which, finely structured test objects can be used. This object of the invention is achieved in that the lighting device is designed as a unit, which can be controlled by the image evaluating unit and which produces at least three colors and which exhibits at least one light emitting diode (LED) as the lighting means.

摘要翻译： 本发明涉及一种用于在探测器中捕获图像的系统和方法。 根据本发明，测试对象的表面依次用第一，第二和第三种颜色的光照亮; 并且图像捕获装置记录表面的灰度图像; 并且通过图像评估装置从三个灰度图像产生合成图像。 本发明的目的是为了通过改进的显示来提高定位精度来定性改进图像捕获，结果可以使用精细结构的测试对象。 本发明的目的是实现照明装置被设计为可以由图像评估单元控制并且产生至少三种颜色的单元，并且其具有作为照明装置的至少一个发光二极管（LED） 。