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公开(公告)号：US06486574B2
公开(公告)日：2002-11-26
申请号：US09812234
申请日：2001-03-19
IPC分类号： H01L2168
CPC分类号： G05D3/12 , Y10T74/20207
摘要： A small footprint vertical lift and rotary positioning stage comprises a bottom wedge and a top wedge, a linear bearing between the bottom wedge and the top wedge, cam grooves and cam surfaces for constraining the motion of the top wedge in a vertical direction, a brushless linear motor for moving the bottom wedge back and forth along a horizontal path raising and lowering the top wedge, a circular table rotatably mounted on the top wedge and having a first cylindrical flange extending downward from a segment of the circumference of the circular table, a bracket mounted on the side of the top wedge, the bracket supporting an upwardly extending second cylindrical flange coaxial with the circular table and the first cylindrical flange, and a brushless curvilinear motor between the first and second cylindrical flanges.
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公开(公告)号：US5731641A
公开(公告)日：1998-03-24
申请号：US807824
申请日：1997-02-27
申请人： Stephen J. Botos , Albert P. Ciez
发明人： Stephen J. Botos , Albert P. Ciez
CPC分类号： G03F7/70716 , H01L21/682 , Y10T74/20207
摘要： A linear motor driven positioning stage comprises a wedge positioned between a carrier and a base and a linear motor positioned between the wedge and the base for moving the wedge relative to the base along a second axis whereby the carrier moves relative to the base along a first axis.
摘要翻译： 线性马达驱动定位台包括定位在载体和基座之间的楔形物以及位于楔形件和基部之间的线性马达，用于沿着第二轴线相对于基部移动楔形物，由此托架沿第一轴线相对于基部移动 轴。
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公开(公告)号：US06442851B1
公开(公告)日：2002-09-03
申请号：US09862097
申请日：2001-05-21
IPC分类号： G01B730
CPC分类号： G02B6/2555 , B23Q1/52 , B23Q1/5406 , B23Q5/28 , B23Q17/00 , G02B6/2551 , G02B6/4226
摘要： A low profile tilt stage comprises a planar base, a cradle defining a cylindrical surface having a cylindrical axis parallel to the base, a table mounted on the cradle by curvilinear bearings, a curvilinear direct drive brushless motor between the cradle and table, and an encoder reader fixed relative to the base and an encoder scale fixed to the table.
摘要翻译： 薄型倾斜台包括平面基座，支架限定具有平行于基座的圆柱形轴向的圆柱形表面，通过曲线轴承安装在支架上的工作台，在支架和工作台之间的曲线式直接驱动无刷电动机和编码器 阅读器相对于基座固定，编码器刻度固定在桌子上。
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公开(公告)号：US4683365A
公开(公告)日：1987-07-28
申请号：US844422
申请日：1986-03-26
申请人： William H. Kasner , Martin H. Cooper , Clark E. Swenson , Albert P. Ciez , Katherine M. Andrews
发明人： William H. Kasner , Martin H. Cooper , Clark E. Swenson , Albert P. Ciez , Katherine M. Andrews
CPC分类号： B23K26/0643 , B23K26/06 , B23K26/0604
摘要： A laser welding beam transport system is provided in which the laser beam 14 emanating from the laser generator 10 is expanded in diameter in an expander 16 at a location close to the generator, and then is transported in its expanded diameter to a remote location where the beam is reduced in diameter in a beam reducer 26 at a location close to the welding station 28 for the purpose of maintaining a relatively constant power density of the beam at the station over a significant range of working travel of the working station.
摘要翻译： 提供了一种激光焊接光束传输系统，其中从激光发生器10发出的激光束14在靠近发生器的位置处在扩展器16中直径扩展，然后以其扩展的直径传输到远程位置， 在靠近焊接站28的位置处的梁减速器26中的梁的直径减小，以便在工作站的工作行程的相当大的工作行程上保持站处的梁的相对恒定的功率密度。
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公开(公告)号：US5348352A
公开(公告)日：1994-09-20
申请号：US945458
申请日：1992-09-16
CPC分类号： F16L39/04 , F23G2203/205
摘要： A rotary connector for coupling at least one stationary pipe to a rotating pipe includes a casing which is connected to a stationary inlet pipe and a stationary outlet pipe and which houses a rotary stem. The rotary stem includes an inner stem disposed within an outer stem for providing a first and second fluid flow path through the rotary stem. A spool is positioned between the rotary stem and the rotating pipe, which leads to a rotating piece of equipment, such as a combustor. The spool has an inner sleeve disposed within an outer sleeve for providing first and second fluid flow paths through the spool. The rotary connector also includes a seal for sealing an inboard end of the casing and a blind flange for sealing an outboard end of the casing. The fluid flows from the inlet pipe, through apertures in the outer stem, through an annulus between the inner and outer stems, through an annulus between the inner and outer sleeves of the spool, and into the coaxial pipe. After the fluid exits the rotary equipment, such as the combustor, the fluid flows back through the coaxial pipe, through the inner sleeve of the spool, through the inner stem of the rotary stem, through apertures in the outer stem and into the outlet pipe attached to the casing.
摘要翻译： 用于将至少一个固定管连接到旋转管的旋转连接器包括连接到固定入口管和固定出口管并且容纳旋转杆的壳体。 旋转杆包括设置在外杆内的内杆，用于提供穿过旋转杆的第一和第二流体流动路径。 阀芯位于旋转杆和旋转管之间，这导致旋转的设备，例如燃烧器。 阀芯具有设置在外部套筒内的内部套筒，用于提供通过阀芯的第一和第二流体流动路径。 旋转连接器还包括用于密封壳体的内侧端的密封件和用于密封壳体的外侧端部的盲法兰。 流体从入口管通过外部阀杆中的孔通过内部和外部阀杆之间的环形空间，通过阀芯的内部和外部套筒之间的环形空气流入同轴管道。 在流体离开旋转设备（例如燃烧器）之后，流体通过同轴管通过线轴的内套筒通过旋转杆的内杆，通过外杆中的孔并流入出口管 附着在外壳上。
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