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公开(公告)号：US06287430B1
公开(公告)日：2001-09-11
申请号：US09467377
申请日：1999-12-21
IPC分类号： C23C1434
CPC分类号： C23C16/50 , C23C14/568 , H01J37/34 , H01J2237/32
摘要： The present invention is drawn to an apparatus for forming a thin film. The apparatus includes a vacuum chamber; a vacuum apparatus connected to the vacuum chamber; a holder placed in the vacuum chamber, which holder holds a substrate and is rotated by means of a rotating mechanism; a plasma CVD apparatus; and a sputtering apparatus, wherein the plasma CVD apparatus and the sputtering apparatus are placed in a single vacuum chamber and a thin film having an medium refractive index is formed on the substrate held by the holder, by means of the plasma CVD apparatus and the sputtering apparatus. The method making use of such an apparatus is also disclosed.
摘要翻译： 本发明涉及用于形成薄膜的装置。 该装置包括真空室; 连接到真空室的真空设备; 放置在真空室中的保持器，该保持器保持基板并通过旋转机构旋转; 等离子体CVD装置; 以及溅射装置，其中将等离子体CVD装置和溅射装置放置在单个真空室中，并且通过等离子体CVD装置和溅射在由保持器保持的基板上形成具有介质折射率的薄膜 仪器。 还公开了利用这种装置的方法。
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2.发明授权公开(公告)号：US06274014B1
公开(公告)日：2001-08-14
申请号：US09517340
申请日：2000-03-02
申请人： Shigeharu Matsumoto , Kazuo Kikuchi
发明人： Shigeharu Matsumoto , Kazuo Kikuchi
IPC分类号： C23C1434
CPC分类号： C23C14/0047 , C23C14/0078
摘要： A method for forming a thin film of a metal compound is disclosed. Within a vacuum chamber, a metallic ultra-thin film of a metal or an incompletely-reacted metal is deposited on a substrate. The metallic ultra-thin film is brought in contact with the electrically neutral activated species of a reactive gas so as to convert the metallic ultra-thin film to an ultra-thin film of a metal compound through the reaction of the metallic ultra-thin film with the activated species of the reactive gas. The above-described steps are sequentially repeated so as to deposit on the substrate the ultra-thin film of the metal compound in layers until a thin film of the metal compound having a desired thickness is formed on the substrate.
摘要翻译： 公开了一种形成金属化合物的薄膜的方法。 在真空室内，将金属的金属超薄膜或不完全反应的金属沉积在基板上。 金属超薄膜与电中性活性物质的反应性气体接触，以通过金属超薄膜的反应将金属超薄膜转变成金属化合物的超薄膜 与活性气体的活化物质。 依次重复上述步骤，以便在衬底上沉积金属化合物的超薄膜，直到在基片上形成具有所需厚度的金属化合物的薄膜。
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公开(公告)号：US06207536B1
公开(公告)日：2001-03-27
申请号：US09092645
申请日：1998-06-09
IPC分类号： H01L2120
CPC分类号： G02B1/12 , C23C14/0078 , C23C14/08 , C23C14/568 , Y10S118/90
摘要： There is disclosed a method and apparatus for forming a thin film of a composite metal compound. Independent targets formed of at least two different metals are sputtered so as to form on a substrate an ultra-thin film of a composite metal or an incompletely-reacted composite metal. The ultra-thin film is irradiated with the electrically neutral, activated species of a reactive gas so as to convert the composite metal or the incompletely-reacted composite metal to a composite metal compound through the reaction of the ultra-thin film with the activated species of the reactive gas. The formation of the ultra-thin film and the conversion to the composite metal compound are sequentially repeated so as to form on the substrate a thin film of the composite metal compound having a desired thickness.
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公开(公告)号：US06328865B2
公开(公告)日：2001-12-11
申请号：US09730564
申请日：2000-12-07
IPC分类号： C23C1400
CPC分类号： G02B1/12 , C23C14/0078 , C23C14/08 , C23C14/568 , Y10S118/90
摘要： There is disclosed a method and apparatus for forming a thin film of a composite metal compound. Independent targets formed of at least two different metals are sputtered so as to form on a substrate an ultra-thin film of a composite metal or an incompletely-reacted composite metal. The ultra-thin film is irradiated with the electrically neutral, activated species of a reactive gas so as to convert the composite metal or the incompletely-reacted composite metal to a composite metal compound through the reaction of the ultra-thin film with the activated species of the reactive gas. The formation of the ultra-thin film and the conversion to the composite metal compound are sequentially repeated so as to form on the substrate a thin film of the composite metal compound having a desired thickness.
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5.发明授权
公开(公告)号：US6103320A
公开(公告)日：2000-08-15
申请号：US92644
申请日：1998-06-09
申请人： Shigeharu Matsumoto , Kazuo Kikuchi
发明人： Shigeharu Matsumoto , Kazuo Kikuchi
CPC分类号： C23C14/0047 , C23C14/0078
摘要： A method for forming a thin film of a metal compound is disclosed. Within a vacuum chamber, a metallic ultra-thin film of a metal or an incompletely-reacted metal is deposited on a substrate. The metallic ultra-thin film is brought in contact with the electrically neutral activated species of a reactive gas so as to convert the metallic ultra-thin film to an ultra-thin film of a metal compound through the reaction of the metallic ultra-thin film with the activated species of the reactive gas. The above-described steps are sequentially repeated so as to deposit on the substrate the ultra-thin film of the metal compound in layers until a thin film of the metal compound having a desired thickness is formed on the substrate.
摘要翻译： 公开了一种形成金属化合物的薄膜的方法。 在真空室内，将金属的金属超薄膜或不完全反应的金属沉积在基板上。 金属超薄膜与电中性活性物质的反应性气体接触，以通过金属超薄膜的反应将金属超薄膜转变成金属化合物的超薄膜 与活性气体的活化物质。 依次重复上述步骤，以便在衬底上沉积金属化合物的超薄膜，直到在基片上形成具有所需厚度的金属化合物的薄膜。
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公开(公告)号：US06400923B1
公开(公告)日：2002-06-04
申请号：US09625976
申请日：2000-07-26
申请人： Hiromitsu Fukuda , Toshio Ogiso , Masaru Nakano , Kazuo Kikuchi , Katsumi Kumada , Chikara Hiraoka , Katsuyoshi Onose , Hitoshi Furuyama , Takashi Kakuhashi
发明人： Hiromitsu Fukuda , Toshio Ogiso , Masaru Nakano , Kazuo Kikuchi , Katsumi Kumada , Chikara Hiraoka , Katsuyoshi Onose , Hitoshi Furuyama , Takashi Kakuhashi
IPC分类号： G03G1520
CPC分类号： G03G15/2053
摘要： A fixing device in an image formation apparatus has a heating roller and a backup roller. These rollers are each coated with single silicone rubber layers around the respective peripheries of their core bars. This silicone rubber has a volume resistance value of 1013 &OHgr;·cm or more. The heating roller is charged with electricity of the same polarity as the polarity of toner particles due to frictional electrification caused at the time of feeding of a recording medium. The heating and the backup roller are polarized reverse to the polarity of the recording medium. A quantity of charged electricity on the backup roller is made larger than that on the heating roller. This permits the image formation apparatus to prevent offset from occurring at the time of fixing a toner image onto the recording medium to cope with various types of recording media.
摘要翻译： 图像形成装置中的定影装置具有加热辊和支撑辊。 这些辊子各自在其芯棒的相应周边周围涂覆有单个硅橡胶层。 该硅橡胶的体积电阻值为1013ΩEG·cm以上。 由于在记录介质的供给时引起的摩擦带电，对加热辊进行与调色剂颗粒的极性相同极性的电荷的充电。 加热和支撑辊的极性与记录介质的极性相反。 支撑辊上的充电量大于加热辊上的充电量。 这允许图像形成装置防止在将调色剂图像定影到记录介质上时发生偏移以处理各种类型的记录介质。
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公开(公告)号：US06379572B1
公开(公告)日：2002-04-30
申请号：US09585984
申请日：2000-06-02
申请人： Kazuo Kikuchi , Shinji Kubota
发明人： Kazuo Kikuchi , Shinji Kubota
IPC分类号： H01J900
CPC分类号： H01J9/025
摘要： A method is provided for manufacturing a flat panel display in which a baseplate has a conductive row electrode deposited on it followed by an insulator. A conductive gate electrode is deposited over the insulator and a soft mask material is deposited over the conductive gate electrode. Microspheres are deposited on the soft mask material and an isotropic etch uses the microspheres as a mask to etch the soft mask material to form soft mask portions under the microspheres. The microspheres are removed and a hard mask material is deposited over the soft mask portions. The hard mask material is processed and chemical mechanical polished down to the soft mask portions which are removed by etching to leave a hard mask which is used by anisotropic etch process to form gate holes in the gate electrode. The gate holes are used to form emitter cavities into which emitters are deposited.
摘要翻译： 提供了一种用于制造平板显示器的方法，其中底板具有沉积在其上的导电行电极，随后是绝缘体。 在绝缘体上沉积导电栅电极，并且在导电栅电极上沉积软掩模材料。 微球沉积在软掩模材料上，并且各向同性蚀刻使用微球作为掩模来蚀刻软掩模材料以在微球下形成软掩模部分。 去除微球，并在软掩模部分上沉积硬掩模材料。 硬掩模材料被处理并化学机械抛光到软掩模部分，其通过蚀刻去除以留下通过各向异性蚀刻工艺用于在栅电极中形成栅极孔的硬掩模。 栅极孔用于形成放射器沉积到其中的发射器腔。
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公开(公告)号：US06308025B1
公开(公告)日：2001-10-23
申请号：US09633821
申请日：2000-08-07
IPC分类号： G03F1500
CPC分类号： G03G15/00
摘要： Two pairs of legs are fitted under two side plates of an electrophotography apparatus, respectively. The two legs in one pair fitted under one of the side plates are disposed on either side of and are spaced from a point which is a cross point of a line joining these two legs, and a line perpendicular to this line, which perpendicular line passes through a projected point obtained by projecting the center of gravity of the electrophotography apparatus onto a horizontal plane on which the apparatus is set up. The two legs in the pair fitted under the other one of the side plates are disposed on either side of and are spaced from a point which is a cross point of a line passing these two legs and a line perpendicular to this line, which perpendicular line passes through the projected point of the center of gravity. The ratio of a shorter distance to a longer distance, of two distances: one between the two legs in a pair and the other between the two legs in the other pair is set to a value of 1/5 to 1/3. With such a arrangement, a defect in an image caused by a distortion in said side plates, due to a position change in the center of gravity of the electrophotography apparatus can be prevented.
摘要翻译： 两对腿分别安装在电子照相设备的两个侧板下方。 安装在一个侧板之下的一对中的两条腿设置在与连接这两条腿的线的交叉点的一侧上的一侧上，并且与垂直于该直线的线垂直的线 通过将电子照相设备的重心投影到设置有该设备的水平平面上而获得的投影点。 配对在另一个侧板下方的两条腿设置在通过这两条腿的线的交叉点和垂直于该线的一条线的任一侧上并与之隔开，该垂直线 穿过重心的投影点。 两个距离之间的较短距离与较长距离的比例：一对中的两条腿之间的比例和另一对中的两条腿之间的比例设置为1/5至1/3的值。 通过这样的布置，可以防止由于电子照相设备的重心位置变化而导致的所述侧板的变形引起的图像缺陷。
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9.发明授权Color cathode field emission device, cold cathode field emission display, and process for the production thereof 失效彩色阴极场发射装置，冷阴极场发射显示器及其制造方法公开(公告)号：US06297587B1
公开(公告)日：2001-10-02
申请号：US09357367
申请日：1999-07-20
申请人： Kazuo Kikuchi , Shinji Kubota
发明人： Kazuo Kikuchi , Shinji Kubota
IPC分类号： H01J902
CPC分类号： H01J9/025 , H01J1/3042
摘要： A process for the production of a cold cathode field emission device comprising the steps of; (A) forming a patterned electrode layer on a dielectric supporting substrate, (B) forming an insulating interlayer on the dielectric supporting substrate and the electrode layer, (C) forming a gate electrode constituted of a first conductive layer on the insulating interlayer, (D) forming an opening portion which penetrates through at least the insulating interlayer and has a bottom portion where the electrode layer is exposed, (E) forming a side-wall of an insulating material on the side wall of the opening portion, to decrease the opening portion in diameter, (F) forming a second conductive layer on the entire surface including the inside of the opening portion by a physical or chemical vapor deposition method, (G) etching back the second conductive layer to form an emitter electrode shaped in the form of a column and constituted of the second conductive layer in the opening portion, and (H) removing at least an upper portion of the side-wall.
摘要翻译： 一种制造冷阴极场致发射器件的方法，包括以下步骤： （A）在电介质支撑基板上形成图案化电极层，（B）在电介质支撑基板和电极层上形成绝缘中间层，（C）形成由绝缘中间层上的第一导电层构成的栅电极（ D）形成至少穿过绝缘中间层并具有露出电极层的底部的开口部分，（E）在开口部分的侧壁上形成绝缘材料的侧壁，以减少 （F）通过物理或化学气相沉积方法在包括开口部分的内部的整个表面上形成第二导电层，（G）蚀刻回第二导电层以形成形成在第二导电层中的发射极电极 并且由开口部分中的第二导电层构成的列的形式，和（H）至少去除侧壁的上部。
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公开(公告)号：US6154622A
公开(公告)日：2000-11-28
申请号：US145259
申请日：1998-09-02
CPC分类号： G03G15/00
摘要： The top surface of the exterior case of a printing apparatus is formed of a first top surface portion which lies substantially above a fixation unit and a paper ejector, a second top surface portion which lies substantially above a control unit, and a third top surface portion which lies substantially above development units, a photosensitive belt and a transfer drum. The levels of the respective top surface portions are higher in the order of the first top surface portion, the second top surface portion and the third top surface portion. Top surface portions of higher levels are located from the front of the upper surface of the exterior case toward the back.
摘要翻译： 打印设备的外壳的顶表面由基本上位于固定单元上的第一顶表面部分和纸喷射器，基本上位于控制单元上的第二顶表面部分和第三顶表面部分 其基本上位于显影单元上方，感光带和转印鼓。 各顶表面部分的高度按照第一顶表面部分，第二顶表面部分和第三顶表面部分的顺序较高。 较高级别的顶表面部分从外壳的上表面的前部朝向后方定位。
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