DETECTOR
    2.
    发明公开
    DETECTOR 审中-公开

    公开(公告)号:US20240036002A1

    公开(公告)日:2024-02-01

    申请号:US18224634

    申请日:2023-07-21

    CPC classification number: G01N27/624

    Abstract: A detector includes a first electrode, second electrodes forming a flow path for charged particles between the first electrode and the second electrodes, third electrodes configured to collect the charged particles, and a fourth electrode having a sheet resistance higher than sheet resistances of the second electrodes. The fourth electrode has one end portion having a first potential in a third direction and another end portion having a second potential lower than the first potential in the third direction, the fifth electrode included in the second electrodes is connected to the fourth electrode, the sixth electrode included in the second electrodes is connected to the fourth electrode, a seventh electrode included in the third electrodes is arranged side by side with the fifth electrode along a first direction, and an eighth electrode included in the third electrodes is arranged side by side with the sixth electrode along the first direction.

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