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公开(公告)号：US11001067B2
公开(公告)日：2021-05-11
申请号：US16667100
申请日：2019-10-29
发明人： Eonseok Lee , Dongjin Lee , Boramchan Sung , Dongyun Lee , Daesung Kim
IPC分类号： B41J2/175
摘要： A chemical liquid supply assembly may include a chemical liquid supply line for providing chemical liquid to ink jet heads. The chemical liquid supply assembly may include a main line having a first diameter and extending in a first direction, branched lines divided from the main line in a second direction perpendicular to the first direction and connected to the ink jet heads, each of the branched line having a second diameter smaller than the first diameter, and a discharge line connected to one end portion of the main line such that bubbles generated in the chemical liquid supply line are discharged out of the chemical liquid supply line while the chemical liquid supply assembly provides the chemical liquid to the ink jet heads.
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公开(公告)号：US11858119B2
公开(公告)日：2024-01-02
申请号：US17515750
申请日：2021-11-01
申请人： Semes Co., Ltd.
发明人： Eonseok Lee , Boramchan Sung
CPC分类号： B25J11/0075 , B05C5/02 , B05C11/00 , B25J9/108 , B25J9/1015 , B25J19/0091
摘要： An apparatus for supplying chemical liquid may include a gantry, a chemical liquid supply member providing a chemical liquid onto a substrate, and a moving device supporting the chemical liquid supply member and moving along the gantry. The moving device may include a moving member, load supporting members and absorbing members. The moving member may support one side of the chemical liquid supply member and may run over the gantry. The moving member may cover an upper face, a first side and a second side of the gantry. The load supporting members may support a load applied to the moving member and the gantry while maintaining a substantially constant distance between the moving member and the gantry. The absorbing members may absorb an impulsive load or an impulsive force applied to the moving member and/or the gantry when the moving member deviates from a moving path provided by the gantry.
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公开(公告)号：US11192372B2
公开(公告)日：2021-12-07
申请号：US16662388
申请日：2019-10-24
申请人： Semes Co., Ltd.
发明人： Boramchan Sung , Myungjin Kim
摘要： An apparatus for processing a substrate may include a stage on which a substrate is placed, an ink jet head assembly for discharging chemical liquid onto the substrate, and a gantry for holding the ink jet head assembly over the substrate on the stage. The ink jet head assembly may include an ink jet head for discharging the chemical liquid onto the substrate, a supporting member for holding the ink jet head, a fixing member being combined with supporting member to fix the supporting member to the fixing member, a protruding member disposed on the fixing member, and a receiving member provided in the supporting member to receive the protruding member.
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