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公开(公告)号：US20200207790A1
公开(公告)日：2020-07-02
申请号：US16564125
申请日：2019-09-09
Applicant: Samsung Electronics Co., Ltd. , Adeka Corporation
Inventor： Gyu-Hee Park , Takanori Koide , Yoshiki Manabe , Masayuki Kimura , Akio Saito , Jaesoon Lim , Younjoung Cho
Abstract: Provided are an aluminum compound and a method for manufacturing a semiconductor device using the same. The aluminum compound may be represented by Formula 1.
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公开(公告)号：US11332486B2
公开(公告)日：2022-05-17
申请号：US16564125
申请日：2019-09-09
Applicant: SAMSUNG ELECTRONICS CO., LTD. , ADEKA CORPORATION
Inventor： Gyu-Hee Park , Takanori Koide , Yoshiki Manabe , Masayuki Kimura , Akio Saito , Jaesoon Lim , Younjoung Cho
Abstract: Provided are an aluminum compound and a method for manufacturing a semiconductor device using the same. The aluminum compound may be represented by Formula 1.
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公开(公告)号：US20210380622A1
公开(公告)日：2021-12-09
申请号：US17215056
申请日：2021-03-29
Applicant: Samsung Electronics Co., Ltd. , ADEKA CORPORATION
Inventor： Seung-Min Ryu , Gyu-Hee Park , Youn Joung Cho , Kazuki Harano , Takanori Koide , Wakana Fuse , Yoshiki Manabe , Yutaro Aoki , Hiroyuki Uchiuzou , Kazuya Saito
IPC: C07F17/00 , C23C16/18 , C23C16/455
Abstract: Materials for fabricating a thin film that has improved quality and productivity are provided. The materials may include a Group 5 element precursor of formula (1): M1 may be a Group 5 element, each of R1 to R10 independently may be a hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 5 carbon atoms, or f7onnula (2), R11 may be a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, and L1 may be an alkyl group, an alkylamino group, an alkoxy group or an alkylsilyl group, each of which may have 1 to 5 carbon atoms and may be substituted or unsubstituted. Formula (2) may have a structure of Each of Ra to Rc independently may be a substituted or unsubstituted alkyl group having 1 to 5 carbon atoms.
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