公开(公告)号：US20250012556A1

公开(公告)日：2025-01-09

申请号：US18403801

申请日：2024-01-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Younguk Jin ,  Wookrae Kim ,  Jinseob Kim ,  Jinyong Kim ,  Garam Choi ,  Daehoon Han

IPC: G01B9/02 ,  G01B9/02001 ,  G01B9/02056

Abstract: A semiconductor measurement apparatus includes lighting unit; a light receiving unit; and a control unit configured to: generate a prediction equation representing the original image, where the prediction equation is based on a plurality of elements of a Mueller matrix, approximate each of the plurality of elements of the Mueller matrix to a polynomial including bases of a Zernike polynomial and coefficients, generate optimization coefficients based on a sum of the coefficients and a difference between the prediction equation and the original image, determine whether an optimization condition is satisfied based on the optimization coefficients and a minimum value, and select a dimension based on the optimization coefficients and the bases when the optimization condition is satisfied.