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公开(公告)号:US20250048639A1
公开(公告)日:2025-02-06
申请号:US18653301
申请日:2024-05-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hakseon Kim , Kangoh Yun , Dongjin Lee , Youngrok Kim , Ryoongbin Lee , Jaeduk Lee
Abstract: A non-volatile memory device includes a peripheral circuit and a memory cell array that are sequentially stacked. The peripheral circuit includes, a device isolation layer defining an active region within a substrate, a first gate electrode extending in a first horizontal direction on the active region, an insulating pattern in a first recess and a second recess spaced apart in a second horizontal direction within the active region on opposing sides of the first gate electrode, a first low concentration doped region along an outer wall of the first recess, a second low concentration doped region along an outer wall of the second recess, a first source/drain region buried in the first low concentration doped region, and a second source/drain region buried in the second low concentration doped region.