公开(公告)号：US20190079003A1

公开(公告)日：2019-03-14

申请号：US15981359

申请日：2018-05-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Heung Ahn ,  Young Duk Kim ,  Sang Gil Park ,  Jun Bum Park ,  Yoichiro Iwa ,  Byeong Hwan Jeon

IPC: G01N21/01 ,  G01N21/17 ,  H01L21/67 ,  G01N21/94 ,  G01N15/14

Abstract: An inspection apparatus includes a light source. A first measurement unit is configured to receive light from the light source and direct it to a first measurement object. A second measurement unit is configured to receive the light from the light source and direct it to a second measurement object. An inspection unit is configured to receive a first optical signal provided from the first measurement unit and inspect the first measurement object using the first optical signal, and to receive a second optical signal provided from the second measurement unit and inspect the second measurement object using the second optical signal. A measurement position selection unit is configured to alternately enable the inspection of the two measurement units by adjusting an angle of a reflection mirror.

公开(公告)号：US09880608B2

公开(公告)日：2018-01-30

申请号：US14840651

申请日：2015-08-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young Duk Kim ,  Gilles Dubost ,  Jinpyo Park ,  Seung Chull Suh ,  Jae Gon Lee ,  Sang Wook Ju ,  Jung Hun Heo

IPC: G06F1/32

CPC classification number: G06F1/324 ,  G06F1/3228 ,  G06F1/3287 ,  Y02B70/12 ,  Y02B70/126 ,  Y02D10/126 ,  Y02D10/171

Abstract: An application processor includes a central processing unit (CPU), intellectual properties (IPs), a hardware power management unit (PMU) configured to determine whether the application processor is in system idle based on a first idle signal output from the CPU and output control signals as a result of the determination, and a clock signal supply control circuit configured to change an output signal supplied to the CPU and the IPs from clock signals to an oscillation clock signal, based on the control signals. The oscillation clock signal has a frequency lower than that of the clock signals.

公开(公告)号：US10473579B2

公开(公告)日：2019-11-12

申请号：US15981359

申请日：2018-05-16

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Heung Ahn ,  Young Duk Kim ,  Sang Gil Park ,  Jun Bum Park ,  Yoichiro Iwa ,  Byeong Hwan Jeon

IPC: G01N21/01 ,  G01N21/17 ,  H01L21/67 ,  G01N21/94 ,  G01N15/14 ,  G01N21/88 ,  G01N21/95 ,  G01N21/84

Abstract: An inspection apparatus includes a light source. A first measurement unit is configured to receive light from the light source and direct it to a first measurement object. A second measurement unit is configured to receive the light from the light source and direct it to a second measurement object. An inspection unit is configured to receive a first optical signal provided from the first measurement unit and inspect the first measurement object using the first optical signal, and to receive a second optical signal provided from the second measurement unit and inspect the second measurement object using the second optical signal. A measurement position selection unit is configured to alternately enable the inspection of the two measurement units by adjusting an angle of a reflection mirror.