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公开(公告)号：US12222362B2
公开(公告)日：2025-02-11
申请号：US17747303
申请日：2022-05-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Yoonbum Nam , Namkyun Kim , Seungbo Shim , Donghyeon Na , Naohiko Okunishi , Dongseok Han , Minyoung Hur , Byeongsang Kim , Kuihyun Yoon
Abstract: An apparatus for measuring parameters of plasma includes a cutoff probe. The cutoff probe includes: a first antenna having a line shape and configured to emit a microwave to the plasma in response to the signal provided by at least one processor; a second antenna having a line shape and configured to generate an electrical signal in response to receiving the microwave emitted by the first antenna and transferred through the plasma; a first insulating layer; a second insulating layer; a first shield; a second shield; an end protection layer covering an end of each of the first insulating layer, the second insulating layer, the first shield, and the second shield; a first antenna protection layer, of insulating nature, covering the first antenna; and a second antenna protection layer, of insulating nature, covering the second antenna.
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公开(公告)号：US20240128054A1
公开(公告)日：2024-04-18
申请号：US18199982
申请日：2023-05-22
Applicant: Samsung Electronics Co., Ltd.
Inventor： Changho Kim , Donghyeon Na , Yoonbum Nam , Seungbo Shim , Kyungsun Kim , Namkyun Kim
CPC classification number: H01J37/32165 , H01J37/32183 , H01J37/32642 , H01J37/32715 , H01L22/26 , H01J37/32568 , H01J37/32917 , H01J2237/2007 , H01J2237/24564 , H01J2237/334
Abstract: A plasma control apparatus includes a first transmission line and a second transmission line transferring radio frequency (RF) power to a plasma chamber, a matcher disposed on the first transmission line a first plasma control circuit disposed on the first transmission line and configured to selectively and independently control harmonics of one or more of the at least two frequencies, a sensor configured to sense the harmonics of the plasma chamber, and an auxiliary RF power source disposed on the second transmission line and configured to generate auxiliary RF power to cancel out the harmonics sensed by the sensor, wherein, in a plan view, the first transmission line transfers the RF power adjacent to the center of the plasma chamber, and the second transmission line transfers the RF power and the auxiliary RF power and the auxiliary RF power adjacent to an edge of the plasma chamber.
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公开(公告)号：US20240128056A1
公开(公告)日：2024-04-18
申请号：US18133277
申请日：2023-04-11
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Hyeontae Kim , Changho Kim , Yoonbum Nam , Seungbo Shim , Minyoung Hur , Kyungsun Kim , Juneeok Leem
IPC: H01J37/32
CPC classification number: H01J37/32449 , H01J37/32568 , H01J37/32816 , H01J2237/334
Abstract: The present disclosure provides plasma etching apparatuses and operating methods of the plasma etching apparatuses. In some embodiments, a plasma etching apparatus includes a processing chamber, a plasma source generator, a bias generator, and an acoustic wave generator. The processing chamber is configured to receive etching gas, and to etch a wafer using plasma that has been formed according to a plasma source pulse and a bias pulse. The a plasma source generator is configured to generate the plasma source pulse. The bias generator is configured to generate the bias pulse. The acoustic wave generator is configured to generate an acoustic wave having a wavefront with a first direction parallel to the wafer and to control a density of a reactive gas of the plasma.
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公开(公告)号：US20230060400A1
公开(公告)日：2023-03-02
申请号：US17747303
申请日：2022-05-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Yoonbum Nam , Namkyun Kim , Seungbo Shim , Donghyeon Na , Naohiko Okunishi , Dongseok Han , Minyoung Hur , Byeongsang Kim , Kuihyun Yoon
Abstract: An apparatus for measuring parameters of plasma includes a cutoff probe. The cutoff probe includes: a first antenna having a line shape and configured to emit a microwave to the plasma in response to the signal provided by at least one processor; a second antenna having a line shape and configured to generate an electrical signal in response to receiving the microwave emitted by the first antenna and transferred through the plasma; a first insulating layer; a second insulating layer; a first shield; a second shield; an end protection layer covering an end of each of the first insulating layer, the second insulating layer, the first shield, and the second shield; a first antenna protection layer, of insulating nature, covering the first antenna; and a second antenna protection layer, of insulating nature, covering the second antenna.
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