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公开(公告)号:US20250167113A1
公开(公告)日:2025-05-22
申请号:US18754295
申请日:2024-06-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jeewoong KIM , Jinkyu KIM , Yunsuk NAM , Yoonbeom PARK , Keunhwi CHO
IPC: H01L23/528 , H01L21/8238 , H01L27/092 , H01L29/06 , H01L29/423 , H01L29/66 , H01L29/775 , H01L29/786
Abstract: Provided is an integrated circuit device including first and second power lines each overlapping a first cell region, an inter-cell separation region, and a second cell region on a substrate in a vertical direction to the substrate, a first power tap cell penetrating through the substrate and receiving a first voltage from the first power line, a second power tap cell penetrating through the substrate and receiving, from the second power line, a second voltage different from the first voltage, and a dummy gate insulating bridge including first and second dummy gate insulating lines, which are apart from each other with the first and second power tap cells therebetween, and defining a vacuum space, and connected to the first and second dummy gate insulating lines.