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公开(公告)号:US20230284450A1
公开(公告)日:2023-09-07
申请号:US18097332
申请日:2023-01-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Youngsik LEE , HYUK KIM , YEONGEUN YOOK
IPC: H10B43/27 , H10B43/10 , H10B43/35 , H10B43/40 , H10B41/10 , H01L23/528 , H10B41/27 , H10B41/35 , H10B41/40
CPC classification number: H10B43/27 , H10B43/10 , H10B43/35 , H10B43/40 , H10B41/10 , H01L23/5283 , H10B41/27 , H10B41/35 , H10B41/40
Abstract: A semiconductor device and an electronic system including the same are provided. The semiconductor device may include a stacked structure including electrodes stacked on a substrate, interlayer insulating layers interposed between the electrodes, and an upper insulating layer covering the uppermost electrode among the electrodes, and a vertical structure passing through the stacked structure in a vertical direction, and each of the interlayer insulating layers may have a first thickness, and the upper insulating layer may have a second thickness greater than the first thickness, and the upper insulating layer may include an insulating material different from an insulating material of each of the interlayer insulating layers.