公开(公告)号：US20240412350A1

公开(公告)日：2024-12-12

申请号：US18406546

申请日：2024-01-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minsu Jo ,  Hankyoul Moon ,  Gawoon Bang ,  Woohyeon So ,  Jongsun An ,  Jooyoun Kang ,  Kwangsoo Kim ,  Karam Lee ,  Kwangsung Lee ,  Sewon Jeon

IPC: G06T7/00 ,  G06T5/50 ,  G06T5/60 ,  G06T5/80 ,  G06T7/586 ,  G06V10/143 ,  G06V10/60 ,  G06V10/77 ,  G06V10/82

Abstract: An optical metrology device includes a lighting unit configured to simultaneously illuminate first illumination light at a first angle of incidence having a difference more than a critical angle from a measurement angle, and second illumination light having a wavelength, different from a wavelength of the first illumination light, at a second angle of incidence having a difference of equal to or less than the critical angle from the measurement angle, onto a surface of a substrate; an optical system configured to collect reflected light from the surface of the substrate according to the first illumination light and the second illumination light; and a multichannel camera configured to generate an original image in which a dark field image and a bright field image of the surface of the substrate are integrated, based on the reflected light collected by the optical system.