公开(公告)号：US20230125680A1

公开(公告)日：2023-04-27

申请号：US17510652

申请日：2021-10-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： USEONG KIM ,  Bayram YENIKAYA ,  Mindy LEE ,  Xin ZHOU ,  HEE-JUN LEE ,  WOO-YONG CHO

IPC: G06F30/398 ,  G06K9/82 ,  G06K9/46

Abstract: Disclosed is an operating method of an electronic device for manufacture of a semiconductor device. The operating method includes receiving a layout image of the semiconductor device, generating an intermediate image by generating assist features based on main features of the layout image, evaluating a process result by performing simulation based on the intermediate image, and correcting the intermediate image by correcting shapes of the main features and/or the assist features of the intermediate image based on the process result.