公开(公告)号：US20240379335A1

公开(公告)日：2024-11-14

申请号：US18396254

申请日：2023-12-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Taijo Jeon ,  Jawon Ko ,  Jongwha Lee ,  Yunsong Jeong

IPC: H01J37/32

Abstract: The present disclosure relates to calibration apparatuses of sensor devices. An example calibration apparatus of a sensor device includes a housing providing a darkroom space by blocking light from the outside, a lighting unit installed in the darkroom space and configured to output light in a specific wavelength band, a stage on which the sensor device, configured to detect intensity of light output by the lighting unit in at least one measurement position, is mounted, the stage installed below the lighting unit in the darkroom space, and a control device configured to receive raw data including intensity of light measured by the sensor device. The control device generates calibration data for adjusting intensity of light measured at the at least one measurement position.

公开(公告)号：US20240377256A1

公开(公告)日：2024-11-14

申请号：US18510461

申请日：2023-11-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yunsong Jeong ,  Jawon Ko ,  Jongwha Lee ,  Taijo Jeon

IPC: G01J3/28 ,  G01J3/51

Abstract: A sensor device includes a lower substrate, an upper substrate disposed on the lower substrate, formed of a material different from a material of the lower substrate, and including a plurality of light-receiving regions disposed in different positions, a plurality of optical members disposed between the lower substrate and the upper substrate, and configured to be generated in a plasma formed in a space above the upper substrate and to provide a traveling path of light entering the plurality of light-receiving regions, a spectrum sensor configured to detect intensity of light received through each of the plurality of optical members in a predetermined wavelength band, a controller configured to generate raw data including intensity of light according to the wavelength band by matching the raw data with each of the plurality of light-receiving regions.

公开(公告)号：US10964570B2

公开(公告)日：2021-03-30

申请号：US16529082

申请日：2019-08-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sangkyung Lee ,  Yong-Jun Ahn ,  Taijo Jeon ,  Kyubum Cho ,  Jongsam Kim ,  Gi-Nam Park ,  Chul-Jun Park ,  Junyong Lee

IPC: H01L21/673 ,  H01L21/67 ,  B05B1/30

Abstract: A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.

公开(公告)号：US11262649B2

公开(公告)日：2022-03-01

申请号：US16901466

申请日：2020-06-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ginam Park ,  Sangmin Kim ,  Jongsam Kim ,  Hongjin Kim ,  Chuljun Park ,  Yongjun Ahn ,  Sangkyung Lee ,  Junyong Lee ,  Taijo Jeon ,  Kyubum Cho

IPC: G03F1/66 ,  B01D46/00 ,  B01D46/44 ,  F25B21/02 ,  F24F3/14 ,  H05B1/02 ,  F24H3/04 ,  B01D46/42 ,  B01D50/00

Abstract: An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.