公开(公告)号：US20140253165A1

公开(公告)日：2014-09-11

申请号：US14198750

申请日：2014-03-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yu-Kyum KIM ,  Joon-Yeon KIM ,  Sung-Ho JOO

IPC: G01R1/073

CPC classification number: G01R1/07378 ,  H05K3/368 ,  H05K2203/061

Abstract: A probe card includes a first circuit substrate electrically connected to a tester, the first circuit substrate having a first size, a second circuit substrate on a lower surface of the first circuit substrate and electrically connected to the first circuit substrate, the second circuit substrate having a second size smaller than the first size, a probe head under the second circuit substrate and electrically connected to the second circuit substrate, the probe head including a plurality of probes in contact with terminals of a device under test (DUT), and a probe holder under the first circuit substrate and supporting the probe head.

Abstract translation: 探针卡包括电连接到测试器的第一电路基板，具有第一尺寸的第一电路基板，在第一电路基板的下表面上的电连接到第一电路基板的第二电路基板，第二电路基板具有 第二尺寸小于第一尺寸的第二尺寸，在第二电路衬底下方的电连接到第二电路衬底的探头，探头包括与被测器件（DUT）的端子接触的多个探针，探针 保持在第一电路基板下并支撑探头。

公开(公告)号：US20150070038A1

公开(公告)日：2015-03-12

申请号：US14472449

申请日：2014-08-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-Ho JOO ,  Yu-Kyum KIM ,  Joon-Yeon KIM

IPC: G01R1/04 ,  G01R1/073

CPC classification number: G01R1/07378 ,  G01R1/06722 ,  G01R1/07371

Abstract: A pogo pin may include a housing, a resilient connecting member and a switching unit. The housing may be arranged between a printed circuit board (PCB) and a probing head. The resilient connecting member may be arranged in the housing to electrically connect the PCB with the probing head. The switching unit may be provided in the housing to selectively cut off an electrical connection between the PCB and the probing head. Thus, because the PCB may not require additional switching substrates, the PCB may have a small size so that the probe card may also have a small size. A semiconductor device may be manufactured using the probe card.

Abstract translation: 弹簧销可以包括壳体，弹性连接构件和开关单元。 壳体可以布置在印刷电路板（PCB）和探测头之间。 弹性连接构件可以布置在壳体中以将PCB与探测头电连接。 开关单元可以设置在壳体中以选择性地切断PCB和探测头之间的电连接。 因此，由于PCB可能不需要额外的开关基板，所以PCB可以具有小尺寸，使得探针卡也可以具有小尺寸。 可以使用探针卡制造半导体器件。