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公开(公告)号:US20240293884A1
公开(公告)日:2024-09-05
申请号:US18397354
申请日:2023-12-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Youngja Kim , Seungyeop Oh
CPC classification number: B23K1/015 , B23K1/0016 , B23K1/20 , H01L21/56 , H01L24/81 , B23K2101/40 , H01L2224/81815
Abstract: In a method of manufacturing an electronic device, a substrate having a plurality of bonding pads formed on a first surface of the substrate is provided. Solder balls are attached on the bonding pads respectively. At least one radiant heating cover is disposed on the first surface of the substrate to cover the solder balls. The substrate on which the at least one radiant heating cover is disposed is loaded into a vapor generating chamber that accommodates a heat transfer fluid therein. The heat transfer fluid is heated to form the heat transfer fluid in a vapor phase within the chamber. The solder balls are soldered by transferring heat generated when the heat transfer fluid in the vapor phase is brought to contact a surface of the radiant heating cover and condenses toward the solder balls as radiant heat emitted from the radiant heating cover.