-
公开(公告)号:US11282738B2
公开(公告)日:2022-03-22
申请号:US16912875
申请日:2020-06-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seung-Nam Kim , Sung-Keun Cho , Seong Eon Park , Jung-Sub Shin , Joon-Sung Lee , Hyun Ik Joe , Hyeon Cheol Jin
IPC: H01L21/687
Abstract: A lift pin module includes a lift pin which includes a head portion disposed at a first end of the lift pin, and a connecting portion disposed at a second end of the lift pin opposite to the first end, the head portion connected to a stage disposed inside a semiconductor process chamber, and the head portion extending in a first direction; an upper weight which includes a side surface with an opening extending in the first direction, the opening configured to receive the lift pin therein, and the upper weight surrounding the connecting portion of the lift pin; and a lower weight screwed to the upper weight, the lower weight disposed below the upper weight.
-
公开(公告)号:US11190891B2
公开(公告)日:2021-11-30
申请号:US16652549
申请日:2018-09-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Yang-Su Kim , Youngsoo Park , Keun Won Jang , Beak-Kwon Son , Nam-Woog Lee , Sunghwan Ko , Gangyoul Kim , Seung-Nam Kim , Jong-Hwan Kim
Abstract: Various embodiments of the present disclosure relate to an apparatus and a method for detecting an error of an audio component in an electronic device. The electronic device includes: at least one sound output device; at least one microphone; and a processor, and the processor is configured to identify a deviation related to a loudness of an audio signal acquired through the at least one microphone, and to determine whether an error related to the at least one microphone occurs, based at least on the deviation. Other embodiments are possible.
-