MASK LAYOUT CORRECTION METHOD AND A METHOD FOR FABRICATING SEMICONDUCTOR DEVICES USING THE SAME

    公开(公告)号:US20210063868A1

    公开(公告)日:2021-03-04

    申请号:US16939828

    申请日:2020-07-27

    Abstract: Disclosed are mask layout correction methods and a method for fabricating semiconductor devices. The mask layout correction method comprises performing a first optical proximity correction on an initial pattern layout. The step of performing the first optical proximity correction includes providing a target pattern of the initial pattern layout with control points based on a first model, obtaining a predicted contour of the initial pattern layout by performing a simulation, and obtaining an error between the target pattern and the predicted contour from the control points. The control points include first control points on an edge of the target pattern and second control points in an inside of the target pattern. The step of obtaining the error includes acquiring first error values from the first control points, providing weights to the first error values, and acquiring second error values from the second control points.

    IMAGE ANALYSIS APPARATUS USING MAIN COLOR AND METHOD OF CONTROLLING THE SAME
    5.
    发明申请
    IMAGE ANALYSIS APPARATUS USING MAIN COLOR AND METHOD OF CONTROLLING THE SAME 有权
    使用主色彩的图像分析装置及其控制方法

    公开(公告)号:US20130121575A1

    公开(公告)日:2013-05-16

    申请号:US13673307

    申请日:2012-11-09

    Abstract: A method of controlling an image analysis apparatus is provided. The method includes receiving a query image; determining at least one main color distributed in the query image and a specific main color from among the at least one main color by using color information contained in the query image; dividing the query image into at least one block having a predetermined number of pixels; and determining whether each of the at least one block includes more than a predetermined percentage of a main color for comparison among the at least main color, and creating a binary spatial distribution map by digitizing the at least one block.

    Abstract translation: 提供了一种控制图像分析装置的方法。 该方法包括:接收查询图像; 通过使用包含在所述查询图像中的颜色信息,从所述至少一个主色中确定分布在所述查询图像中的至少一个主色和所述特定主色; 将查询图像分割成具有预定数量的像素的至少一个块; 并且确定所述至少一个块中的每一个是否包括超过所述至少主要颜色之间的用于比较的主色彩的预定百分比,以及通过数字化所述至少一个块来创建二进制空间分布图。

    Mask layout correction method and a method for fabricating semiconductor devices using the same

    公开(公告)号:US11500283B2

    公开(公告)日:2022-11-15

    申请号:US16939828

    申请日:2020-07-27

    Abstract: Disclosed are mask layout correction methods and a method for fabricating semiconductor devices. The mask layout correction method comprises performing a first optical proximity correction on an initial pattern layout. The step of performing the first optical proximity correction includes providing a target pattern of the initial pattern layout with control points based on a first model, obtaining a predicted contour of the initial pattern layout by performing a simulation, and obtaining an error between the target pattern and the predicted contour from the control points. The control points include first control points on an edge of the target pattern and second control points in an inside of the target pattern. The step of obtaining the error includes acquiring first error values from the first control points, providing weights to the first error values, and acquiring second error values from the second control points.

    Image analysis apparatus using main color and method of controlling the same
    7.
    发明授权
    Image analysis apparatus using main color and method of controlling the same 有权
    使用主色的图像分析装置及其控制方法

    公开(公告)号:US08913828B2

    公开(公告)日:2014-12-16

    申请号:US13673307

    申请日:2012-11-09

    Abstract: A method of controlling an image analysis apparatus is provided. The method includes receiving a query image; determining at least one main color distributed in the query image and a specific main color from among the at least one main color by using color information contained in the query image; dividing the query image into at least one block having a predetermined number of pixels; and determining whether each of the at least one block includes more than a predetermined percentage of a main color for comparison among the at least main color, and creating a binary spatial distribution map by digitizing the at least one block.

    Abstract translation: 提供了一种控制图像分析装置的方法。 该方法包括:接收查询图像; 通过使用包含在所述查询图像中的颜色信息,从所述至少一个主色中确定分布在所述查询图像中的至少一个主色和所述特定主色; 将查询图像分割成具有预定数量的像素的至少一个块; 并且确定所述至少一个块中的每一个是否包括超过所述至少主要颜色之间的用于比较的主色彩的预定百分比,以及通过数字化所述至少一个块来创建二进制空间分布图。

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