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公开(公告)号:US20250040140A1
公开(公告)日:2025-01-30
申请号:US18603505
申请日:2024-03-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ju Seong MIN , Jun Gyeom KIM , Hyun Min KIM , Kang-Oh YUN , Taek Kyu YOON , Dong Jin LEE , Jae Duk LEE , Jee Hoon HAN
Abstract: A semiconductor memory device comprises a cell structure and a peripheral circuit structure electrically connected to the cell structure. The peripheral circuit structure comprises an active region, a first gate structure comprising a first gate insulating layer intersecting the active region and in contact with the active region, a second gate structure comprising a second gate insulating layer spaced apart from the first gate structure, and in contact with the active region, and a source/drain region between the first gate structure and the second gate structure. A thickness of the first gate insulating layer is less than a thickness of the second gate insulating layer. The source/drain region comprises a first region adjacent to the first gate structure and a second region adjacent to the second gate structure. A depth of the first region is equal to a depth of the second region.
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公开(公告)号:US20250126799A1
公开(公告)日:2025-04-17
申请号:US18673528
申请日:2024-05-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kang-Oh YUN , Yunjo LEE , Dongjin LEE , Jaeduk LEE
Abstract: A semiconductor device may include a substrate containing first to third doping regions, first and second gate structures between the first and second doping regions, and a gate separation layer between the first and second gate structures. Each of the first and second gate structures may include a first gate dielectric layer, a first gate conductive layer on the first gate dielectric layer, and a second gate conductive layer between the gate separation layer and the first gate conductive layer. The gate separation layer may include a first sidewall in contact with the first gate structure and a second sidewall in contact with the second gate structure. A top surface of the gate separation layer may be at a same level as a top surface of the second gate conductive layer.
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