公开(公告)号：US10712662B2

公开(公告)日：2020-07-14

申请号：US15405612

申请日：2017-01-13

Applicant: Samsung Electronics Co., Ltd. ,  Dongjin Semichem Co., Ltd.

Inventor： Jin-A Ryu ,  Jung-Youl Lee ,  Kyung-Lyul Moon ,  Yool Kang ,  Hyun-Jin Kim ,  Yu-Jin Jeoung ,  Man-Ho Han

IPC: C08G18/02 ,  G03F7/11 ,  H01L21/3213 ,  H01L21/311 ,  H01L21/027 ,  H01L49/02 ,  C09D175/00 ,  G03F7/004 ,  G03F7/09 ,  G03F7/16 ,  G03F7/20 ,  G03F7/32 ,  G03F7/38 ,  H01L21/306 ,  H01L21/308

Abstract: A method of forming a pattern is disclosed. The method includes preparing a composition that includes a solvent and a polymer including a repeating unit in which at least one isocyanurate unit having a first structure is connected to another isocyanurate unit having a second structure different from the first structure; applying the composition on a substrate to form an underlayer; forming a photoresist layer on the underlayer; etching the photoresist layer to form a photoresist pattern; and patterning the substrate using the photoresist pattern.

公开(公告)号：US09528949B2

公开(公告)日：2016-12-27

申请号：US14197737

申请日：2014-03-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jung-Hoon Kim ,  Jin-A Ryu ,  Chang-Ho Lee ,  Dong-Won Kim ,  Jae-Ho Kim ,  Jung-Dae Park ,  Nae-Ry Yu ,  Pil-Kwon Jun

IPC: G01N23/20

CPC classification number: G01N23/20025 ,  G01N2223/611

Abstract: In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.

Abstract translation: 在检测层的不均匀性的方法中，入射光可以在第一入射角位置被照射到层的至少两个区域。 可以感测从层的两个区域反射的第一反射光。 可以在第二入射角位置将入射光照射到层的至少两个区域。 可以感测到从层的两个区域反射的第二反射光。 可以将第一反射光和第二反射光相互比较以获得层的不均匀性。 因此，可以发现具有斑点的层。

公开(公告)号：US20140270078A1

公开(公告)日：2014-09-18

申请号：US14197737

申请日：2014-03-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jung-Hoon Kim ,  Jin-A Ryu ,  Chang-Ho Lee ,  Dong-Won Kim ,  Jae-Ho Kim ,  Jung-Dae Park ,  Nae-Ry Yu ,  Pil-Kwon Jun

IPC: G01N23/20

CPC classification number: G01N23/20025 ,  G01N2223/611

Abstract: In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.

Abstract translation: 在检测层的不均匀性的方法中，入射光可以在第一入射角位置被照射到该层的至少两个区域。 可以感测从层的两个区域反射的第一反射光。 可以在第二入射角位置将入射光照射到层的至少两个区域。 可以感测到从层的两个区域反射的第二反射光。 可以将第一反射光和第二反射光相互比较以获得层的不均匀性。 因此，可以发现具有斑点的层。