公开(公告)号：US10208397B2

公开(公告)日：2019-02-19

申请号：US15204994

申请日：2016-07-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung-Min Ryu ,  Sang Min Lee ,  Hee Jong Jeong ,  Chaeho Kim ,  Ji Su Son ,  Jaebong Lee ,  Juwan Lim ,  Jungwoo Choi

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  C23C16/50 ,  C30B25/08 ,  C30B25/10 ,  C30B25/12 ,  C30B25/14 ,  C30B25/16 ,  C30B29/06 ,  C30B29/10 ,  C23C16/48 ,  C23C16/52

Abstract: An apparatus is provided for depositing a thin film. The apparatus includes a chamber, a susceptor disposed in the chamber and supporting a substrate, a reflection housing disposed outside the chamber, a light source unit disposed in the reflection housing and irradiating light to the susceptor, and a light controlling unit blocking at least a portion of an irradiation path of the light to control an irradiation area of the light on the susceptor. At least a portion of the light controlling unit is disposed in the reflection housing.