公开(公告)号：US11189467B2

公开(公告)日：2021-11-30

申请号：US16444590

申请日：2019-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin-Uk Park ,  Sun-Ho Kim ,  Sung-Jin Kim ,  Jong-Geug Kim ,  Kyu-Chul Shim ,  Ji-Hoon Yeo ,  Shin-Sang Lee ,  Gyu-Chan Jeoung ,  Sung-Wook Jung ,  Jae-Chul Hwang

IPC: H01J37/32 ,  H01L21/687

Abstract: An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.

公开(公告)号：US20200161099A1

公开(公告)日：2020-05-21

申请号：US16444590

申请日：2019-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin-Uk Park ,  Sun-Ho Kim ,  Sung-Jin Kim ,  Jong-Geug Kim ,  Kyu-Chul Shim ,  Ji-Hoon Yeo ,  Shin-Sang Lee ,  Gyu-Chan Jeoung ,  Sung-Wook Jung ,  Jae-Chul Hwang

IPC: H01J37/32 ,  H01L21/687

Abstract: An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.

公开(公告)号：US09889556B2

公开(公告)日：2018-02-13

申请号：US14661688

申请日：2015-03-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sun-Ho Kim ,  Ki-Hoon Nam ,  Tae-Min Earmme ,  Seok Heo ,  Jae-Chul Hwang

IPC: A01B1/00 ,  B25J9/04 ,  B25J9/10 ,  H01L21/677

CPC classification number: B25J9/042 ,  B25J9/1065 ,  B25J9/107 ,  H01L21/67742 ,  Y10S901/15 ,  Y10T74/20305

Abstract: A link structure includes a first link, a second link having an end that is connected to an end of the first link, a third link having an end that is connected to the end of the first link, and provided on a portion of the second link, a first rotary shaft partially provided in the first link, a first actuator configured to rotate the first link about the first rotary shaft; a second rotary shaft partially provided in the second link, the second rotary shaft being different from the first rotary shaft, and a second actuator configured to rotate the second link about the second rotary shaft, the first and second actuators being provided in the first link.