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公开(公告)号：US20240375227A1
公开(公告)日：2024-11-14
申请号：US18657146
申请日：2024-05-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： DONGHYUN KIM , JONGSEONG KO , DAEYONG KIM , JISU KIM , PYUNGKANG KIM , KIHONG PARK , JUNGJUN PARK , JUNGJOON PARK , JOOYOUNG PARK , JUNHYEOK PARK , HOSEOK SONG , CHIHO AHN , KONGWOO LEE , HYUNYOUNG LEE , CHUYOUNG CHOUNG , JEONGMIN HWANG
Abstract: A fastening device includes: a support portion including a first end portion, and a second end portion, and a central portion between the first and second end portions; a first pulley, a second pulley, and a third pulley rotatably disposed on the central portion, the first end portion, and the second end portion, respectively; a first connection portion and a second connection portion respectively rotatably disposed on the first and second end portions and respectively connected to the second and third pulleys; a first fastening tool and a second fastening tool respectively connected to the first and second connection portions; and a motor connected to the first pulley, wherein a force generated by the motor and provided to the first pulley is at least partially transmitted to the second and third pulleys to vary a distance between the first and second fastening tools.
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公开(公告)号：US20220093391A1
公开(公告)日：2022-03-24
申请号：US17336924
申请日：2021-06-02
Applicant: Samsung Electronics Co., Ltd.
Inventor： YEONGBONG PARK , JISU KIM , BYOUNGHO KWON
IPC: H01L21/02 , H01L21/306 , B08B3/02 , B08B3/08 , B08B3/04 , B08B1/00 , B08B1/04 , B08B1/02 , B24B37/34 , B05B1/14
Abstract: A method of processing a substrate may include preparing the substrate, polishing the substrate, and cleaning the substrate using a double nozzle, which is configured to provide a spray and a chemical solution onto the substrate. The spray may include a deionized water, and the chemical solution may be diluted with the deionized water. The chemical solution and the spray may be spaced apart from each other by a distance of 7 cm to 12 cm.
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