公开(公告)号：US20220143543A1

公开(公告)日：2022-05-12

申请号：US17380109

申请日：2021-07-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seoyoung Maeng ,  Iljun Jeon ,  Suji Gim ,  Youngseok Roh ,  Jongyong Bae ,  Jungjoon Pyeon

IPC: B01D50/00 ,  B01D45/16 ,  B01D45/08 ,  B01D46/48 ,  B01D46/42

Abstract: An apparatus for collecting a by-product, includes: a chamber provided with a gas inlet and a gas outlet and having an internal space; a heater disposed on the gas inlet side of the internal space within the chamber and varying a heating temperature in time series; a vortex forming member disposed around the heater; a plurality of first collecting members disposed below the heater; a second collecting member disposed below the first collecting member so that a plurality of second collecting members intersect each other; and a third collecting member disposed on the gas outlet side of the internal space within the chamber.

公开(公告)号：US11660563B2

公开(公告)日：2023-05-30

申请号：US17380109

申请日：2021-07-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seoyoung Maeng ,  Iljun Jeon ,  Suji Gim ,  Youngseok Roh ,  Jongyong Bae ,  Jungjoon Pyeon

IPC: B01D50/20 ,  B01D45/16 ,  B01D46/48 ,  B01D46/42 ,  B01D45/08

CPC classification number: B01D50/20 ,  B01D45/08 ,  B01D45/16 ,  B01D46/4263 ,  B01D46/48 ,  B01D2279/51

Abstract: An apparatus for collecting a by-product, includes: a chamber provided with a gas inlet and a gas outlet and having an internal space; a heater disposed on the gas inlet side of the internal space within the chamber and varying a heating temperature in time series; a vortex forming member disposed around the heater; a plurality of first collecting members disposed below the heater; a second collecting member disposed below the first collecting member so that a plurality of second collecting members intersect each other; and a third collecting member disposed on the gas outlet side of the internal space within the chamber.