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公开(公告)号：US09727799B2
公开(公告)日：2017-08-08
申请号：US14819566
申请日：2015-08-06
Applicant: Samsung Electronics Co., Ltd.
Inventor： Il-suk Park , Jeong-ho Ahn , Hyung-suk Cho
CPC classification number: G06K9/481 , G06K9/6201 , G06K2009/6213 , G06K2209/19 , G06T7/001 , G06T2207/10061 , G06T2207/30148
Abstract: A method of automatic defect classification (ADC) includes detecting defective parts from a substrate wherein at least one unit process is performed; and classifying defect types of the respective defective parts, wherein the classifying includes obtaining a scanning electron microscope (SEM) image of each of the defective parts; registering information about the substrate in a graphic data system (GDS) image corresponding to each SEM image; defining a plurality of defects of interest (DOIs) categorizing defects of the respective defective parts; defining a DOI rule that is a criterion for determining which defects of the respective defective parts correspond to which DOI from among the DOIs; and analyzing the image to classify which defects of the respective defective parts correspond to which DOI from among the DOIs according to the DOI rule.
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公开(公告)号：US20160180513A1
公开(公告)日：2016-06-23
申请号：US14819566
申请日：2015-08-06
Applicant: Samsung Electronics Co., Ltd.
Inventor： Il-suk Park , Jeong-ho Ahn , Hyung-suk Cho
CPC classification number: G06K9/481 , G06K9/6201 , G06K2009/6213 , G06K2209/19 , G06T7/001 , G06T2207/10061 , G06T2207/30148
Abstract: A method of automatic defect classification (ADC) includes detecting defective parts from a substrate wherein at least one unit process is performed; and classifying defect types of the respective defective parts, wherein the classifying includes obtaining a scanning electron microscope (SEM) image of each of the defective parts; registering information about the substrate in a graphic data system (GDS) image corresponding to each SEM image; defining a plurality of defects of interest (DOIs) categorizing defects of the respective defective parts; defining a DOI rule that is a criterion for determining which defects of the respective defective parts correspond to which DOI from among the DOIs; and analyzing the image to classify which defects of the respective defective parts correspond to which DOI from among the DOIs according to the DOI rule.
Abstract translation: 一种自动缺陷分类（ADC）的方法包括从基板检测缺陷部分，其中执行至少一个单元处理; 对各缺陷部分的缺陷类型进行分类，其中分类包括获得每个缺陷部分的扫描电子显微镜（SEM）图像; 在与每个SEM图像相对应的图形数据系统（GDS）图像中登记关于所述基板的信息; 定义分类各个缺陷部分的缺陷的多个感兴趣缺陷（DOI）; 定义DOI规则，其是用于确定相应缺陷部分的哪些缺陷对应于DOI中的哪个DOI的标准; 并分析图像，根据DOI规则将相应缺陷部分的哪些缺陷从DOI中对应于哪个DOI。
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