公开(公告)号：US10103043B2

公开(公告)日：2018-10-16

申请号：US15260874

申请日：2016-09-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun Sun Choi ,  Yun-Kwang Jeon ,  Taekyun Kang

IPC: H01L21/67 ,  B01D46/00 ,  B01D46/42 ,  B01D46/44 ,  H01L21/677 ,  H01L21/673

Abstract: The inventive concepts provide apparatuses for transferring a substrate and/or apparatuses for processing a substrate including the same. The substrate transferring apparatus including a chamber, a filter assembly disposed in a chamber to provide external air into the chamber, and an additional assembly including a moisture removing part and a purge gas providing part sequentially stacked on the filter assembly may be provided. The filter assembly may be coupled to the additional assembly.

公开(公告)号：US10566221B2

公开(公告)日：2020-02-18

申请号：US16142916

申请日：2018-09-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun Sun Choi ,  Yun-Kwang Jeon ,  Taekyun Kang

IPC: B01D50/00 ,  H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  B01D46/00 ,  B01D46/42 ,  B01D46/44

Abstract: The inventive concepts provide apparatuses for transferring a substrate and/or apparatuses for processing a substrate including the same. The substrate transferring apparatus including a chamber, a filter assembly disposed in a chamber to provide external air into the chamber, and an additional assembly including a moisture removing part and a purge gas providing part sequentially stacked on the filter assembly may be provided. The filter assembly may be coupled to the additional assembly.

公开(公告)号：US20190067054A1

公开(公告)日：2019-02-28

申请号：US16142916

申请日：2018-09-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun Sun Choi ,  Yun-Kwang Jeon ,  Taekyun Kang

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  B01D46/00 ,  B01D46/44 ,  B01D46/42

CPC classification number: H01L21/67196 ,  B01D46/0045 ,  B01D46/4263 ,  B01D46/448 ,  B01D2279/45 ,  H01L21/67017 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67184 ,  H01L21/67201 ,  H01L21/67248 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/67778

Abstract: The inventive concepts provide apparatuses for transferring a substrate and/or apparatuses for processing a substrate including the same. The substrate transferring apparatus including a chamber, a filter assembly disposed in a chamber to provide external air into the chamber, and an additional assembly including a moisture removing part and a purge gas providing part sequentially stacked on the filter assembly may be provided. The filter assembly may be coupled to the additional assembly.